Based on the optimum regimes developed for the dc cathode sputtering of targets, multilayer coatings consisting of oxide films have been obtained with low optical losses. Optimization has been carried out from the results of experimental measurements of the absorption and scattering coefficients. Further improvement of the method opens up the possibility of using it for modern compact thin-film optics with perfect structure and well-controlled layer thickness.
N. D. Goldina, "Depositing coatings for laser optics by means of the ionÃ¢Â€Â“plasma method," J. Opt. Technol. 70, 210-214 (2003)