Abstract
This paper presents the results of a study of the thermodynamic parameters of the plasma of a
pulsed vacuum UV light source based on a stopped-down jet discharge. The character of
the outflow of the high-temperature erosion products of the plasma-forming material of the stop
in vacuum is established. The spectroenergetic characteristics of the radiation of the
cathode jet in the vacuum-UV region (90-190 nm) are obtained in the gas-dynamic and
magnetohydrodynamic flow regimes of the plasma at an interelectrode gap of decimeter
size.
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