Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them
Journal of Optical Technology, Vol. 75, Issue 12, pp. 800-805 (2008)
http://dx.doi.org/10.1364/JOT.75.000800
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Abstract
This paper discusses questions of synthesizing and pressing aluminum nitride in order to obtain film-forming materials that can be used to form optical coatings. Based on the resulting film-forming materials, a technological process has been developed for fabricating coatings from aluminum nitride, based on two vacuum methods of depositing thin films: vacuum evaporation and magnetron sputtering. Questions of the use of aluminum nitride films in optical instrumentation are considered.
© 2008 Optical Society of America
Citation
V. V. Kirilenko, B. M. Zhigarnovskiĭ, V. K. Pavlovskiĭ, I. P. Markelova, A. V. Mikhaĭlov, and G. A. Muranova, "Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them," J. Opt. Technol. 75, 800-805 (2008)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-75-12-800
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