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Journal of Optical Technology

Journal of Optical Technology


  • Vol. 75, Iss. 12 — Dec. 1, 2008
  • pp: 800–805

Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them

V. V. Kirilenko, B. M. Zhigarnovskiĭ, V. K. Pavlovskiĭ, I. P. Markelova, A. V. Mikhaĭlov, and G. A. Muranova  »View Author Affiliations

Journal of Optical Technology, Vol. 75, Issue 12, pp. 800-805 (2008)

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This paper discusses questions of synthesizing and pressing aluminum nitride in order to obtain film-forming materials that can be used to form optical coatings. Based on the resulting film-forming materials, a technological process has been developed for fabricating coatings from aluminum nitride, based on two vacuum methods of depositing thin films: vacuum evaporation and magnetron sputtering. Questions of the use of aluminum nitride films in optical instrumentation are considered.

© 2008 Optical Society of America

V. V. Kirilenko, B. M. Zhigarnovskiĭ, V. K. Pavlovskiĭ, I. P. Markelova, A. V. Mikhaĭlov, and G. A. Muranova, "Synthesizing film-forming materials based on aluminum nitride in order to form optical coatings from them," J. Opt. Technol. 75, 800-805 (2008)

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