Photolithography in the production of circular optical scales at the Ural Optomechanical Factory
Journal of Optical Technology, Vol. 75, Issue 4, pp. 282-284 (2008)
http://dx.doi.org/10.1364/JOT.75.000282
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Abstract
This paper discusses questions of the modernization of the production of circular optical scales. The results of modernizing the production and of introducing the technology of reverse photolithography for fabricating geodesic dials, rasters, and code disks are presented.
© 2008 Optical Society of America
Citation
D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," J. Opt. Technol. 75, 282-284 (2008)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-75-4-282
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