Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems
Journal of Optical Technology, Vol. 78, Issue 11, pp. 706-708 (2011)
http://dx.doi.org/10.1364/JOT.78.000706
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Abstract
This paper discusses apparatus for measuring the characteristics of the residual birefringence of large optical crystals of fluorite by the method of crossed polarizing sheets. A mathematical model of the proposed method is presented. The point-spread function, which describes the influence of birefringence on the image quality, is analyzed.
© 2011 OSA
History
Original Manuscript: March 9, 2011
Published: November 30, 2011
Citation
M. A. Gan and E. A. Nikulina, "Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems," J. Opt. Technol. 78, 706-708 (2011)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-78-11-706
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