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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 78, Iss. 11 — Nov. 1, 2011
  • pp: 706–708

Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems

M. A. Gan and E. A. Nikulina  »View Author Affiliations


Journal of Optical Technology, Vol. 78, Issue 11, pp. 706-708 (2011)
http://dx.doi.org/10.1364/JOT.78.000706


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Abstract

This paper discusses apparatus for measuring the characteristics of the residual birefringence of large optical crystals of fluorite by the method of crossed polarizing sheets. A mathematical model of the proposed method is presented. The point-spread function, which describes the influence of birefringence on the image quality, is analyzed.

© 2011 OSA

History
Original Manuscript: March 9, 2011
Published: November 30, 2011

Citation
M. A. Gan and E. A. Nikulina, "Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems," J. Opt. Technol. 78, 706-708 (2011)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-78-11-706


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References

  1. M. Born and E. Wolf, Principles of Optics: Electromagnetic Theory of Propagation, Interference, and Diffraction of Light (Pergamon Press, Oxford, 1965; Nauka, Moscow, 1973).
  2. A. V. Shubnikov, Optical Crystallography (Izd. Akad. Nauk SSSR, Moscow, 1950).
  3. W. A. Shurcliff, Polarized Light: Production and Use (Harvard Univ. Press, Cambridge, Mass., 1962; Mir, Moscow, 1965).
  4. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (Elsevier, New York, 1977; Mir, Moscow, 1981).
  5. M. A. Gan and S. I. Ustinov, “Computer modelling of two-dimensional images of test objects taking the actual aberrations of the optical systems into account,” Trudy Gos. Opt. Inst. 51, No. 185 (1982).

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