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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 78, Iss. 5 — May. 1, 2011
  • pp: 308–316

Antenna-coupled microbolometers

V. Yu. Zerov, V. G. Malyarov, and I. A. Khrebtov  »View Author Affiliations


Journal of Optical Technology, Vol. 78, Issue 5, pp. 308-316 (2011)
http://dx.doi.org/10.1364/JOT.78.000308


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Abstract

This paper analyzes the development trends of devices and processes for fabricating antenna-coupled microbolometers for the IR, submillimeter, and millimeter ranges. Depending on the problem to be solved, these thermal detectors can be self-contained or can be built into linear or two-dimensional arrays and can operate at temperatures of 300, 78, and 4 K. The temperature determines the choice of material of the thin-film heat-sensitive element—metal, semiconductor, high-temperature or classical superconductor. The planar antennas used in these detectors provide efficient reception of radiation in the specified spectral range. The achievable parameters and examples of the use of antenna-coupled microbolometers are discussed.

© 2011 OSA

History
Original Manuscript: September 14, 2010
Published: June 20, 2011

Citation
V. Yu. Zerov, V. G. Malyarov, and I. A. Khrebtov, "Antenna-coupled microbolometers," J. Opt. Technol. 78, 308-316 (2011)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-78-5-308


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