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Areas in which vacuum ultraviolet excilamps are used (Review)

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Abstract

This paper presents the results of using vacuum ultraviolet excilamps based on the excited inert-gas dimers Xe2* (172 nm), Kr2* (146 nm), and Ar2* (126 nm) in scientific research and commercial practice—namely, in illumination engineering and analytical instrumentation, for the creation of new optical materials, photochemistry, and the modification of surface properties.

© 2012 OSA

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