There are two methods for discretizing the source when the formation of a photolithographic image is modelled in terms of the Abbe model: This can be done using a rectangular grid with various discretization steps, or with radial placement of the points on a rectangular grid with various steps along a radius and along the arc length between the points. It is shown that the use of a radial distribution of the points significantly speeds up the computation process, with the modelling accuracy being mainly determined by the step along the radius.
© 2012 OSA
Original Manuscript: November 16, 2011
Published: May 30, 2012
T. V. Ivanova and L. V. Zueva, "Study of methods for discretizing a source when modelling a photolithographic image," J. Opt. Technol. 79, 295-298 (2012)