This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm<sup>2</sup> in the windowless regime.
© 2012 OSA
Original Manuscript: March 14, 2012
Published: August 31, 2012
M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, D. V. Shitts, and M. V. Erofeev, "Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge," J. Opt. Technol. 79, 503-508 (2012)