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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 79, Iss. 8 — Aug. 31, 2012
  • pp: 503–508

Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, D. V. Shitts, and M. V. Erofeev  »View Author Affiliations


Journal of Optical Technology, Vol. 79, Issue 8, pp. 503-508 (2012)
http://dx.doi.org/10.1364/JOT.79.000503


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Abstract

This paper presents the results of studies of excilamps with excitation by a barrier corona discharge, which is characterized by inhomogeneous broadening of the electric field between the electrodes, one of which is covered by a dielectric. It is established that the radiation efficiency from inert-gas dimers under these excitation conditions reaches 45% at 172 nm and 25% at 146 nm. These studies were used as a basis for creating a radiator complex consisting of sealed xenon-dimer excilamps with a radiation power of up to 120 W, and a wide-aperture compact excilamp with argon pumped through the discharge volume. The radiation power density of the compact excilamp reached 10 mW/cm2 in the windowless regime.

© 2012 OSA

History
Original Manuscript: March 14, 2012
Published: August 31, 2012

Citation
M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, D. V. Shitts, and M. V. Erofeev, "Vacuum-ultraviolet excilamps with excitation by a barrier corona discharge," J. Opt. Technol. 79, 503-508 (2012)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-79-8-503

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