This paper presents the results of a study of the spectral characteristics of the plasma radiation (175–200 nm) of a pulse-periodic capacitive-discharge lamp that operates with a mixture of water vapor and argon. It is shown that capacitive discharge at low argon pressure is a broad-band source of vacuum ultraviolet radiation. The intensity of the emission bands of the capacitive-discharge plasma is optimized as a function of the partial pressures of argon and water vapor. The electron kinetic coefficients are calculated for a discharge in a mixture of argon and water vapor.
© 2012 OSA
Original Manuscript: March 11, 2012
Published: August 31, 2012
A. K. Shuaibov, A. I. Minya, Z. T. Gomoki, I. V. Shevera, and R. V. Gritsak, "Capacitive-discharge VUV lamp based on a water-vapor–argon mixture," J. Opt. Technol. 79, 512-514 (2012)