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Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 80, Iss. 8 — Aug. 1, 2013
  • pp: 499–501

Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography

D. Yu. Kruchinin  »View Author Affiliations


Journal of Optical Technology, Vol. 80, Issue 8, pp. 499-501 (2013)
http://dx.doi.org/10.1364/JOT.80.000499


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Abstract

This paper discusses the possibilities of reducing the angular errors of circular optical scales fabricated by lift-off photolithography, using photomasks synthesized by means of a CLWS-300 laser image generator.

© 2013 Optical Society of America

OCIS Codes
(110.5220) Imaging systems : Photolithography

History
Original Manuscript: December 5, 2012
Published: October 15, 2013

Citation
D. Yu. Kruchinin, "Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography," J. Opt. Technol. 80, 499-501 (2013)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-80-8-499


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References

  1. D. Yu.  Kruchinin, “Method of fabricating optical scales by lift-off photolithography,” Russian Patent No. 2 370 799 (2009).
  2. D. Yu.  Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008) [J. Opt. Technol. 75, 282 (2008)].
  3. D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].
  4. D. Yu.  Kruchinin, “Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography,” Opt. Zh. 77, No. 6, 46 (2010) [J. Opt. Technol. 77, 387 (2010)].
  5. Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].
  6. S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.
  7. D. Yu.  Kruchinin, O. B.  Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].
  8. D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].
  9. D. Yu.  Kruchinin, O. B.  Yakovlev, “Photomasks for the production of optical scales,” in Transactions of the International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 2, pp. 111–114.

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