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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 80, Iss. 8 — Aug. 1, 2013
  • pp: 499–501

Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography

D. Yu. Kruchinin  »View Author Affiliations


Journal of Optical Technology, Vol. 80, Issue 8, pp. 499-501 (2013)
http://dx.doi.org/10.1364/JOT.80.000499


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Abstract

This paper discusses the possibilities of reducing the angular errors of circular optical scales fabricated by lift-off photolithography, using photomasks synthesized by means of a CLWS-300 laser image generator.

© 2013 Optical Society of America

OCIS Codes
(110.5220) Imaging systems : Photolithography

History
Original Manuscript: December 5, 2012
Published: October 15, 2013

Citation
D. Yu. Kruchinin, "Study of the possibility of reducing the angular errors of circular optical scales fabricated by lift-off photolithography," J. Opt. Technol. 80, 499-501 (2013)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-80-8-499

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