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Variation of the surface roughness of CVD ZnSe undergoing mechanical processing as a function of the grain size of the suspension

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Abstract

This paper discusses how the grain size of the processing suspension affects the variation of the surface roughness of zinc selenide during its mechanical processing. Atomic-force microscopy is used to establish how the arithmetic mean and rms roughness of the ground and polished surface depends on the abrasive grain size. It is shown that the arithmetic mean and rms deviation that characterizes the surface roughness decreases nonlinearly as the abrasive grain size decreases.

© 2013 Optical Society of America

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