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Journal of Optical Technology

Journal of Optical Technology


  • Vol. 81, Iss. 3 — Mar. 1, 2014
  • pp: 139–145

Image conversion in uncooled mosaic microbolometer detectors for the IR and terahertz regions with a format up to 3072 × 576 or more

M. A. Dem’yanenko, D. G. Esaev, A. G. Klimenko, A. I. Kozlov, I. V. Marchishin, V. N. Ovsyuk, and A. R. Novoselov  »View Author Affiliations

Journal of Optical Technology, Vol. 81, Issue 3, pp. 139-145 (2014)

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This paper discusses the process-design principles for creating hyperlarge-format mosaic photodetectors (MPDs), based on the butt-joining process of silicon chips with uncooled small-format microbolometer detector arrays (MBDAs). The basic unit is investigated and optimized for the process operations of laser scribing as part of the high-precision butt-joining process of chips in which the process part of the blind zone between the photosensitive edge elements of adjacent MBDA chips has a total size no greater than 30 μm. The design and layout are synthesized for 384×288-format silicon multiplexers, from which a 3072×576-format MPD fabricated using the butt-joining process developed here can provide better than 99% image-conversion efficiency for IR microbolometers and up to 100% for terahertz-range microbolometers.

© 2014 Optical Society of America

OCIS Codes
(040.3060) Detectors : Infrared
(110.3080) Imaging systems : Infrared imaging
(130.5990) Integrated optics : Semiconductors

Original Manuscript: July 17, 2013
Published: April 21, 2014

M. A. Dem’yanenko, D. G. Esaev, A. G. Klimenko, A. I. Kozlov, I. V. Marchishin, V. N. Ovsyuk, and A. R. Novoselov, "Image conversion in uncooled mosaic microbolometer detectors for the IR and terahertz regions with a format up to 3072 × 576 or more," J. Opt. Technol. 81, 139-145 (2014)

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