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Journal of Optical Technology

Journal of Optical Technology


  • Vol. 81, Iss. 5 — May. 1, 2014
  • pp: 298–302

Features of laser oxidation of thin films of titanium

E. A. Shakhno, D. A. Sinev, and A. M. Kulazhkin  »View Author Affiliations

Journal of Optical Technology, Vol. 81, Issue 5, pp. 298-302 (2014)

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This paper discusses the possibility of direct single-stage thermochemical recording on thin-film titanium, based on the difference of the optical properties of the film in the irradiated and unirradiated areas. A technique is proposed for theoretically analyzing the process of oxidizing thin metallic films, allowing for the change of the film’s absorptivity during irradiation. The main regularities of the process of laser oxidation of titanium films are determined, and, among other things, it is shown that it is preferable to use the thinnest possible films for thermochemical recording.

© 2014 Optical Society of America

OCIS Codes
(310.6860) Thin films : Thin films, optical properties
(350.3390) Other areas of optics : Laser materials processing

Original Manuscript: February 7, 2014
Published: May 30, 2014

E. A. Shakhno, D. A. Sinev, and A. M. Kulazhkin, "Features of laser oxidation of thin films of titanium," J. Opt. Technol. 81, 298-302 (2014)

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