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Imaging systems : Microlithography


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  • JOSA A, Vol. 31, Issue 7, pp. 1515-1519 (July 2014)
  • Matthieu C. R. Leibovici, Thomas K. Gaylord

  • Optics Letters, Vol. 37, Issue 11, pp. 2061-2063 (June 2012)
  • Yuanying Tu, Xiangzhao Wang, Sikun Li, Yuting Cao

  • Optics Letters, Vol. 39, Issue 13, pp. 3798-3801 (July 2014)
  • Matthieu C. R. Leibovici, Thomas K. Gaylord

  • Optics Express, Vol. 20, Issue 15, pp. 16684-16689 (July 2012)
  • Hao Wu, Wei Hu, Hua-chao Hu, Xiao-wen Lin, Ge Zhu, Jae-Won Choi, Vladimir Chigrinov, Yan-qing Lu

  • Optics Express, Vol. 20, Issue 19, pp. 21792-21804 (September 2012)
  • Jia Li, Yijiang Shen, Edmund Y. Lam

  • Optics Express, Vol. 21, Issue 7, pp. 8076-8090 (April 2013)
  • Jia Li, Shiyuan Liu, Edmund Y. Lam

  • Optics Express, Vol. 21, Issue 24, pp. 29921-29926 (December 2013)
  • Carsten Eschenbaum, Daniel GroƟmann, Katja Dopf, Siegfried Kettlitz, Tobias Bocksrocker, Sebastian Valouch, Uli Lemmer

  • Optics Express, Vol. 22, Issue 11, pp. 12935-12943 (June 2014)
  • Islam Ashry, Ishac Kandas, Xiangyu Wei, Joseph A. Calderone, Baigang Zhang, Hans D. Robinson, James R. Heflin, Webster L. Santos, Yong Xu

  • Optics Express, Vol. 22, Issue 13, pp. 16310-16321 (June 2014)
  • T. Weichelt, U. Vogler, L. Stuerzebecher, R. Voelkel, U. D. Zeitner

  • Optics Express, Vol. 22, Issue 24, pp. 29668-29678 (December 2014)
  • Michael Crescimanno, Tom N. Oder, James H. Andrews, Chuanhong Zhou, Joshua B. Petrus, Cory Merlo, Cameron Bagheri, Connor Hetzel, James Tancabel, Kenneth D. Singer, Eric Baer

  • Applied Optics, Vol. 51, Issue 16, pp. 3329-3337 (June 2012)
  • Z. Kolahdouz, J. Koohsorkhi, M. A. Cheraghi, M. Saviz, S. Mohajerzadeh

  • Applied Optics, Vol. 52, Issue 23, pp. 5862-5868 (August 2013)
  • Dong Won Kang, Minwook Kang, Jae W. Hahn

  • Applied Optics, Vol. 53, Issue 34, pp. J1-J6 (December 2014)
  • Aamod Shanker, Lei Tian, Martin Sczyrba, Brid Connolly, Andrew Neureuther, Laura Waller

  • Applied Optics, Vol. 53, Issue 34, pp. J7-J18 (December 2014)
  • Kenneth C. Johnson

  • Applied Optics, Vol. 53, Issue 36, pp. 8507-8513 (December 2014)
  • Dong Won Kang, Minwook Kang, Jae W. Hahn

  • Chinese Optics Letters, Vol. 10, Issue 12, pp. 121202-121202 (December 2012)
  • Dongbo Xu, Xiangzhao Wang, Yang Bu, Lifeng Duan, Guanyong Yan, Jishuo Yang, Anatoly Y. Burov

  • Journal of the Optical Society of Korea, Vol. 16, Issue 2, pp. 127-132 (June 2012)
  • Yi-Hsiang Huang, Jeng-Ywan Jeng

  • Journal of the Optical Society of Korea, Vol. 16, Issue 3, pp. 221-227 (September 2012)
  • Jung-Yu Hur, Man-Seung Seo

  • Optical Materials Express, Vol. 2, Issue 5, pp. 519-525 (May 2012)
  • Kyung Kook Jang, Prem Prabhakaran, Deepak Chandran, Jong-Jin Park, Kwang-Sup Lee

  • Optical Materials Express, Vol. 4, Issue 12, pp. 2535-2541 (December 2014)
  • Shi-Jun Ge, Wei Ji, Guo-Xin Cui, Bing-Yan Wei, Wei Hu, Yan-Qing Lu
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