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Polymeric multi-channel bandpass filters in phase-shifted Bragg waveguide gratings by direct electron beam writing

Lin Zhu, Yanyi Huang, William M. J. Green, and Amnon Yariv

Open Access Open Access

Abstract

We apply direct electron beam writing to fabricate corrugated sidewall Bragg gratings in polymer waveguides and demonstrate multi-channel passband filters based on a phase-shifted design. Experimental results are compared with numerical fittings to analyze the impact of signal polarization and waveguide cladding material upon device performance.

©2004 Optical Society of America

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Figures (4)
Fig. 1.
Fig. 1. Schematic diagrams of (a) polymeric waveguide gratings with two phase shift defects, and (b) the corresponding effective refractive index profile along the propagation direction.

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Fig. 2.
Fig. 2. SEM image of a polymeric grating device with a waveguide width W of 1.5 µm, grating period Λ of 500 nm, and grating depth D of 600 nm.

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Fig. 3.
Fig. 3. Transmission spectrum of a uniform grating filter (a) TE polarization, neff=1.4992 and Δn=0.0090 from fitting results (b) TM polarization, neff=1.5011 and Δn=0.0067 from fitting results.

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Fig. 4.
Fig. 4. Transmission spectrum of a passband filter with phase shift defects for TE polarization (a) without the index matching fluid, for TE polarization neff=1.4923 and Δn=0.0050 from fitting results, for TM polarization neff=1.4960 and Δn=0.0042 from fitting results (b) with the index matching fluid as upper cladding, for TE polarization neff=1.5016 and Δn=0.0070 from fitting results, for TM polarization neff=1.5040 and Δn=0.0064 from fitting results.

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