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Fabrication-tolerant high quality factor photonic crystal microcavities

Kartik Srinivasan, Paul E. Barclay, and Oskar Painter

Open Access Open Access

Abstract

A two-dimensional photonic crystal microcavity design supporting a wavelength-scale volume resonant mode with a calculated quality factor (Q) insensitive to deviations in the cavity geometry at the level of Q≳2×104 is presented. The robustness of the cavity design is confirmed by optical fiber-based measurements of passive cavities fabricated in silicon. For microcavities operating in the λ=1500 nm wavelength band, quality factors between 1.3–4.0×104 are measured for significant variations in cavity geometry and for resonant mode normalized frequencies shifted by as much as 10% of the nominal value.

©2004 Optical Society of America

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Figures (3)
Fig. 1.
Fig. 1. (a) FDTD calculated magnetic field amplitude (|B|) in the center of the optically thin membrane for the fundamental A20 mode. (b) Scanning electron microscope image of a fabricated Si PC microcavity with a graded defect design (PC-5 described below).

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Fig. 2.
Fig. 2. Grade in the normalized hole radius (r/a) along the central x̂ and ŷ axes of square lattice PC cavities such as those shown in Fig. 1. Cavity r/a profiles for (a,b) FDTD cavity designs and (c,d) microfabricated Si cavities.

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Fig. 3.
Fig. 3. (a) Schematic illustrating the fiber taper probe measurement setup. (b) SEM image of an array of undercut PC cavities (white box indicates position of one device within the array). (c) Measured data (blue dots) and exponential fit (red curve) for linewidth vs. taper-PC gap of the A20 mode in PC-5. (Inset) Taper transmission for this device when the taper-PC gap is 350 nm. (d) Same as (c) for PC-6 (here, the taper transmission in the inset is shown when Δz=650 nm). The transmission curves are normalized relative to transmission in the absence of the PC cavity.

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Tables (1)

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Table 1. Theoretical (PC-A through PC-E) and experimental (PC-1 through PC-7) normalized frequency (a/λo ) and quality factor (Q) values for the A20 mode of cavities with profiles shown in Fig. 2.

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