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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 18 — Sep. 5, 2005
  • pp: 7189–7197

Miniature Planar Solid Immersion Mirror with Focused Spot Less Than a Quarter Wavelength

William Challener, Christophe Mihalcea, Chubing Peng, and Kalman Pelhos  »View Author Affiliations

Optics Express, Vol. 13, Issue 18, pp. 7189-7197 (2005)

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We describe a microoptical planar waveguide solid immersion mirror with high optical throughput, and show that it can focus light to spot sizes of ~90 nm at a wavelength of 413 nm. Scanning near field optical microscope images of the light within the device are in good agreement with a simple theoretical model. This device is accurately mass-produced with lithographic and thin film deposition techniques known from modern integrated circuit processing.

© 2005 Optical Society of America

OCIS Codes
(130.1750) Integrated optics : Components
(180.5810) Microscopy : Scanning microscopy
(210.4770) Optical data storage : Optical recording
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

Original Manuscript: August 2, 2005
Revised Manuscript: August 29, 2005
Published: September 5, 2005

William Challener, Christophe Mihalcea, Chubing Peng, and Kalman Pelhos, "Miniature Planar Solid Immersion Mirror with Focused Spot Less Than a Quarter Wavelength," Opt. Express 13, 7189-7197 (2005)

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