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Tunable Bragg reflectors on silicon-on-insulator rib waveguides

Ivano Giuntoni, Andrzej Gajda, Michael Krause, Ralf Steingrüber, Jürgen Bruns, and Klaus Petermann

Open Access Open Access

Abstract

We present the design, fabrication and characterization of Bragg reflectors on silicon-on-insulator rib waveguides. The fabrication is based on a new double lithographic process, combining electron-beam lithography for the grating and photolithography for the waveguides. This process allows the realization of low loss reflectors, which were fully characterized. The influence of the etching depth and of the waveguide geometry on the reflector performance is considered. We demonstrate a reflectivity larger than 80% over a bandwidth of 0.8 nm with an insertion loss of only 0.5 dB. A thermal tunability of the device is also considered, showing that a shift of the reflected wavelength of 77 pm/K is possible.

©2009 Optical Society of America

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Figures (8)
Fig. 1
Fig. 1 Geometrical parameters of a silicon-on-insulator rib waveguide Bragg grating: L overall length, d grating depth, a grating trench, Λ grating period, w waveguide width, t rib height, h rib etching depth.

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Fig. 2
Fig. 2 Calculated reflectivity R and transmissivity T spectra of a Bragg reflector with d = 150 nm, D = 0.3 and L = 800 µm. The grating period is Λ = 225 nm.

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Fig. 3
Fig. 3 SEM micrograph with a tilted top view of the fabricated Bragg reflector with an etching depth of 80 nm on a 1.6 µm wide rib waveguide.

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Fig. 4
Fig. 4 Scheme of the measurement setup used for the characterization of the fabricated Bragg reflectors.

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Fig. 5
Fig. 5 Transmission and reflection spectra for Bragg reflectors fabricated on a 1.6 µm wide rib waveguide. The grating depth is (a,c) 150 nm and (b,d) 80 nm, the period 225 nm (a,c) 226 nm (b,d) and the length 800 µm.

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Fig. 6
Fig. 6 Comparison between computed and experimentally measured (a) transmission and (b) reflection spectra. The grating depth is d = 80 nm, the period Λ = 226 nm and the overall length L = 800 µm. TE polarization is considered. All spectra are in linear scale.

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Fig. 7
Fig. 7 Dependence between the peak reflected wavelength and the width of the waveguide. The points represent the measured data, the dashed line is a linear fit.

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Fig. 8
Fig. 8 Reflection spectra a Bragg reflector on a 2.2 µm wide rib waveguide for three different temperatures for both TE and TM polarization. The grating depth is 150 nm, the duty cycle 0.3 and the overall length 800 µm.

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Equations (4)

Equations on this page are rendered with MathJax. Learn more.

R=Pgrat-PwgPinKη2exp(-2αL)
Λ(T)=Λ0(1+γΔT)
n(T)=n0+dndTΔT .
dλdT=2n0γΛ0+2Λ0dndT.
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