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Electrically pumped 1.3 μm room-temperature InAs/GaAs quantum dot lasers on Si substrates by metal-mediated wafer bonding and layer transfer

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Abstract

An electrically pumped InAs/GaAs quantum dot laser on a Si substrate has been demonstrated. The double-hetero laser structure was grown on a GaAs substrate by metal-organic chemical vapor deposition and layer-transferred onto a Si substrate by GaAs/Si wafer bonding mediated by a 380-nm-thick Au-Ge-Ni alloy layer. This broad-area Fabry-Perot laser exhibits InAs quantum dot ground state lasing at 1.31 μm at room temperature with a threshold current density of 600 A/cm2.

©2010 Optical Society of America

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Figures (3)

Fig. 1
Fig. 1 RT photoluminescence spectrum and (inset) 1 × 1 μm atomic force microscope image of the as-grown InAs QDs grown by antimony-mediated MOCVD.
Fig. 2
Fig. 2 (a) Cross-sectional schematic of the fabricated InAs/GaAs QD laser on Si substrate. (b) Cross-sectional scanning electron microscope image of the QD laser structure layer-transferred onto a Si substrate.
Fig. 3
Fig. 3 Light-current characteristics of the laser (CL/CL, pulsed, RT). Insets show the electroluminescence spectra at J = 0.2 and 1.0 kA/cm2.
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