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Multi-focus two-photon polymerization technique based on individually controlled phase modulation

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Abstract

Multi-focus two-photon polymerization with a spatial light modulator is demonstrated. The spatial light modulator generates multi-focus spots via phase modulation technique controlled by a computer generated hologram (CGH) pattern. Each focus spot can be individually addressed in position and laser intensity. The multi-focus two-photon polymerization technique allows the fabrication of complex 2-D and 3-D structures both symmetric and asymmetric. Smooth sine curved polymerized lines with amplitude of 5 μm and a period of 200 μm were obtained by fast switching of the CGH patterns.

©2010 Optical Society of America

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Supplementary Material (3)

Media 1: MOV (970 KB)     
Media 2: MOV (2800 KB)     
Media 3: MOV (1024 KB)     

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Figures (7)

Fig. 1
Fig. 1 Experimental setup for multi-focus two-photon polymerization with a spatial light modulator. Inset: sample preparation.
Fig. 2
Fig. 2 Experimental setup for CGH refresh rate measurement (a) and detected signal (b).
Fig. 3
Fig. 3 Combination of four focus spots (left) and fabricated 2PP line structures (right) (Media 1).
Fig. 4
Fig. 4 Design pattern of a 2-D structure (LZH logo) (a) and SEM images of 2PP structures consisting of lines (Media 2) (b) and dots (c). Both structures are fabricated by four focus spots.
Fig. 5
Fig. 5 SEM images of sine curve structures fabricated with a single focus spot (a) (Media 3), three focus spots (b), and six focus spots (c) at phase shifts of 120° or 60°, respectively.
Fig. 6
Fig. 6 Asymmetric 3-D structures (convex and concave) in design (a) and in realization by parallelized multi-focus production (b).
Fig. 7
Fig. 7 Calculated CGH patterns leading to laser powers of 10 and 30 mW at the sample surface, respectively (a) and a SEM image showing a 2PP line array fabricated at laser powers between 1 and 30 mW (b). The laser power is controlled with different CGHs.
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