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1.3 μm InAs/GaAs quantum dot lasers on Si rib structures with current injection across direct-bonded GaAs/Si heterointerfaces

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Abstract

An InAs/GaAs quantum dot laser on a Si rib structure has been demonstrated. The double heterostructure laser structure grown on a GaAs substrate is layer-transferred onto a patterned Si substrate by GaAs/Si direct wafer bonding without oxide or metal mediation. This Fabry-Perot laser operates with current injection through the GaAs/Si rib interface and exhibits InAs quantum dot ground state lasing at 1.28 μm at room temperature, with a threshold current density of 480 A cm−2.

©2012 Optical Society of America

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Figures (7)

Fig. 1
Fig. 1 Schematic flow diagram of the fabrication process for the InAs/GaAs QD lasers on Si rib structures.
Fig. 2
Fig. 2 Atomic force microscope image of the as-grown InAs QDs.
Fig. 3
Fig. 3 Room-temperature photoluminescence spectrum of the as-grown InAs/GaAs QD laser structure.
Fig. 4
Fig. 4 Scanning electron microscope image of a laser structure grown on a GaAs substrate direct-bonded to a Si rib.
Fig. 5
Fig. 5 Light-current characteristics of the fabricated InAs/GaAs QD laser on a Si rib at room temperature.
Fig. 6
Fig. 6 DC current-voltage characteristics of the InAs/GaAs QD laser on a Si rib at room temperature.
Fig. 7
Fig. 7 Lasing spectrum of the laser at a current density of 680 A cm−2 at room temperature.
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