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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 7 — Apr. 8, 2002
  • pp: 303–308

Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam–sensitive gray-scale mask

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong  »View Author Affiliations

Optics Express, Vol. 10, Issue 7, pp. 303-308 (2002)

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A negative-tone inorganic–organic hybrid SiO2:TiO2 glass is investigated for fabrication of refractive microlenses. This sol-gel material enjoys an advantage over materials used in conventional photoresist-based fabrication techniques in that it lends itself to a single-step etching-free process. The application of a high-energy beam-sensitive (HEBS) mask provides a reliable and simple method for fabrication of three-dimensional micro-optical elements with a single UV exposure. The technique of using the sol-gel material with the HEBS gray-scale mask has considerable potential for low-cost mass production of continuous-phase-level diffractive optical elements and micro-optical structures.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

Original Manuscript: February 19, 2002
Revised Manuscript: March 18, 2002
Published: April 8, 2002

Xiao Cong Yuan, W. Yu, N. Ngo, and W. Cheong, "Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam�sensitive gray-scale mask," Opt. Express 10, 303-308 (2002)

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  1. H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, �Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,� Opt. Eng. 40, 2017-2021 (2001). [CrossRef]
  2. S. I. Najafi, T. Touam, R. Sara, M. P. Andrews, and M. A. Farada, �Sol-gel glass waveguide and grating on silicon,� J. Lightwave Technol. 16, 1640-1646 (1998). [CrossRef]
  3. P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, �Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,� Opt. Commun. 143, 199-202 (1997). [CrossRef]
  4. P. �yr�s, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, �Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,� Opt. Commun. 162, 215-218 (1999). [CrossRef]
  5. S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A.V. Tishchenko, and O. Parriaux, �Single-step UV recording of sinusoidal surface gratings in hybrid sol-gel glasses,� Appl. Opt. 38, 6744-6748 (1999). [CrossRef]
  6. J. T. Rantala, P. �yr�s, R. Levy, S. Honkanen, M.R. Descour, and N. Peyghambarian, �Binary-phase zoneplate arrays based on hybrid sol-gel glass,� Opt. Lett. 23, 1939-1941 (1998). [CrossRef]
  7. K. Kintaka, J. Nishii, and N. Tohge, �Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method,� Appl. Opt. 39, 489-493 (2000). [CrossRef]
  8. Canyon Materials, Inc., website <a href="http://www.canyonmaterials.com ">http://www.canyonmaterials.com</a>

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