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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 10, Iss. 7 — Apr. 8, 2002
  • pp: 303–308

Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam–sensitive gray-scale mask

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong  »View Author Affiliations


Optics Express, Vol. 10, Issue 7, pp. 303-308 (2002)
http://dx.doi.org/10.1364/OE.10.000303


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Abstract

A negative-tone inorganic–organic hybrid SiO2:TiO2 glass is investigated for fabrication of refractive microlenses. This sol-gel material enjoys an advantage over materials used in conventional photoresist-based fabrication techniques in that it lends itself to a single-step etching-free process. The application of a high-energy beam-sensitive (HEBS) mask provides a reliable and simple method for fabrication of three-dimensional micro-optical elements with a single UV exposure. The technique of using the sol-gel material with the HEBS gray-scale mask has considerable potential for low-cost mass production of continuous-phase-level diffractive optical elements and micro-optical structures.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Research Papers

History
Original Manuscript: February 19, 2002
Revised Manuscript: March 18, 2002
Published: April 8, 2002

Citation
Xiao Cong Yuan, W. Yu, N. Ngo, and W. Cheong, "Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam�sensitive gray-scale mask," Opt. Express 10, 303-308 (2002)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-10-7-303


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References

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