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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 11, Iss. 18 — Sep. 8, 2003
  • pp: 2244–2252

Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

D.W. de Lima Monteiro, O. Akhzar-Mehr, P.M. Sarro, and G. Vdovin  »View Author Affiliations

Optics Express, Vol. 11, Issue 18, pp. 2244-2252 (2003)

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We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We discuss the factors defining the precision of the formed component and the resulting surface quality. We demonstrate 1 mm and 5 mm replicated aspherical phase plates, reproducing defocus, tilt, astigmatism and high-order aberrations. The technology has a potential for serial production of reflective and refractive arbitrary aspherical micro-optical components.

© 2003 Optical Society of America

OCIS Codes
(220.1000) Optical design and fabrication : Aberration compensation
(220.1250) Optical design and fabrication : Aspherics
(220.3620) Optical design and fabrication : Lens system design
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(350.3850) Other areas of optics : Materials processing

ToC Category:
Research Papers

Original Manuscript: June 26, 2003
Revised Manuscript: September 1, 2003
Published: September 8, 2003

D. W. de Lima Monteiro, O. Akhzar-Mehr, P. M. Sarro, and G. Vdovin, "Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si," Opt. Express 11, 2244-2252 (2003)

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