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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 10 — May. 17, 2004
  • pp: 2120–2129

Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

Yves Bellouard, Ali Said, Mark Dugan, and Philippe Bado  »View Author Affiliations

Optics Express, Vol. 12, Issue 10, pp. 2120-2129 (2004)

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We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).

© 2004 Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(320.2250) Ultrafast optics : Femtosecond phenomena
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors

ToC Category:
Research Papers

Original Manuscript: April 2, 2004
Revised Manuscript: April 29, 2004
Published: May 17, 2004

Yves Bellouard, Ali Said, Mark Dugan, and Philippe Bado, "Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching," Opt. Express 12, 2120-2129 (2004)

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