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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 10 — May. 17, 2004
  • pp: 2120–2129

Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

Yves Bellouard, Ali Said, Mark Dugan, and Philippe Bado  »View Author Affiliations


Optics Express, Vol. 12, Issue 10, pp. 2120-2129 (2004)
http://dx.doi.org/10.1364/OPEX.12.002120


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Abstract

We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).

© 2004 Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(320.2250) Ultrafast optics : Femtosecond phenomena
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors

ToC Category:
Research Papers

History
Original Manuscript: April 2, 2004
Revised Manuscript: April 29, 2004
Published: May 17, 2004

Citation
Yves Bellouard, Ali Said, Mark Dugan, and Philippe Bado, "Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching," Opt. Express 12, 2120-2129 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-10-2120


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References

  1. Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu, and K. Hirao, �??Three-Dimensional Microscopic Crystallization in Photosensitive Glass by Femtosecond Laser Pulses at Nonresonant Wavelength,�?? Jpn. J. Appl. Phys. 37, L94 - L96 (1998). [CrossRef]
  2. A. Marcinkevièius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, �??Femtosecond Laser-assisted three-dimensional microfabrication in silica,�?? Opt. Lett. 26, 277-279 (2001). [CrossRef]
  3. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, �??Writing waveguides in glass with a femtosecond laser,�?? Opt. Lett. 21, 1729-1731 (1996). [CrossRef] [PubMed]
  4. A. Strelsov and N. Borrelli, �??Study of femtosecond-laser-written waveguides in glasses,�?? J. Opt. Soc. Am. B 19, 2496-2504 (2002). [CrossRef]
  5. A. Agarwal and M. Tomozawa, �??Correlation of silica glass properties with the infrared spectra,�?? J. Non-Cryst. Solids 209, 166-174 (1997). [CrossRef]
  6. R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, M. Mehandale, V. R. Bhardwaj, anfd P. B. Corkum, �??Ultra-high resolution index of refraction profiles of femtosecond laser modified silica structures,�?? Opt. Express 11, 775-781 (2003), <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-7-775">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-7-775</a>. [CrossRef] [PubMed]
  7. Y. Bellouard, A. Said, M. Dugan, P. Bado, �??Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica,�?? MRS Proceedings, vol. 782, Boston 2003 (in press). [CrossRef]
  8. P. Oberson, B. Gisin, B. Huttner, and N. Gisin, �??Refracted near-field measurements of refractive index and geometry of silica-on-silicon integrated optical waveguides,�?? Appl. Opt. 37, 7268-7272 (1998). [CrossRef]
  9. P. Bado, A. Said, M. Dugan, T. Sosnowski, and S. Wright, �??Dramatic improvements in waveguide manufacturing with femtosecond lasers,�?? in NFOEC, Dallas, Sept. 2002.
  10. R. Gattass, I. Maxwell, J. Ashcom, and E. Mazur, �??Transition from repetitive to cumulative thermal processing in femtosecond laser induced machining of embedded waveguides�?? in Photonics West, Proc. SPIE 4978, 43 (2004).
  11. C. Schaffer, J. Garcia and E. Mazur �??Bulk heating of transparent materials using a high repetition-rate femtosecond laser,�?? Appl. Phys. A - Mater 76, 351-354 (2003). [CrossRef]
  12. K. Awazu, H. Kawazoe, �??Strained Si �?? O �?? Si bonds in amorphous SiO2 materials: A family member of active centers in radio, photo, and chemical responses,�?? J. Appl. Physics 94, 6243-6262 (2003). [CrossRef]
  13. C. Fiori, R.A.B. Devine, �??Evidence for a wide continuum of polymorphs in a-SiO2,�?? Phys. Rev. B 33, 2972-2974 (1986). [CrossRef]
  14. F. L. Galeener, �??Planar rings in glass,�?? Solid State Commun. 44, 1037-1040 (1982). [CrossRef]

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