Deposition and characterization of germanium sulphide glass planar waveguides
Optics Express, Vol. 12, Issue 11, pp. 2501-2506 (2004)
http://dx.doi.org/10.1364/OPEX.12.002501
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Abstract
Germanium sulphide glass thin films have been deposited on CaF2 and Schott N-PSK58 glass substrates directly by means of chemical vapor deposition (CVD). The deposition rate of germanium sulphide glass film by this CVD process is estimated about 12 µm/hr at 500°C. These films have been characterized by micro-Raman spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM). Their transmission range extends from 0.5µm to 7µm measured by UV-VIS-NIR and FT-IR spectroscopy. The refractive index of germanium sulphide glass film measured by prism coupling technique was 2.093±0.008 and the waveguide loss measured at 632.8nm by He-Ne laser was 2.1±0.3 dB/cm.
© 2004 Optical Society of America
OCIS Codes
(160.4670) Materials : Optical materials
(220.4610) Optical design and fabrication : Optical fabrication
ToC Category:
Research Papers
History
Original Manuscript: March 26, 2004
Revised Manuscript: May 14, 2004
Published: May 30, 2004
Citation
C.C. Huang, D. Hewak, and J. Badding, "Deposition and characterization of germanium sulphide glass planar waveguides," Opt. Express 12, 2501-2506 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-11-2501
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References
- A. K. Mairaj, P. Hua, H. N. Rutt, D. W. Hewak, �??Fabrication and characterization of continuous wave direct UV (λ=244 nm) written channel waveguides in chalcogenide (Ga:La:S) glass,�?? J. Lightwave Technol. 20,1578-84 (2002 ). [CrossRef]
- Keiji Tanaka, �??Photoinduced process in Chalcogenide glass,�?? Current Opinion in Solid State & Materials Science 1, 567 (1996). [CrossRef]
- D. Marchese, M. De Sario, A. Jha, A. K. Kar, E. C. Smith, �??Highly nonlinear GeS2-based chalcogenide glass for all-optical twin-core-fibre switching,�?? J. Opt. Soc. Am. 15, 2361 (1998). [CrossRef]
- E. Marquez, T. Wagner, J.M. Gonzalez-Leal, A.M. Bernal-Oliva, R. Prieto-Alcon, R. Jimenez-Garay, P.J.S. Ewen, �??Controlling the optical constant of thermally-evaporated Ge10Sb30S60 chalcogenide glass films by photodoping with silver,�?? J. Non-Cryst. Solids 274, 62-68 (2000). [CrossRef]
- S. Ramachandran and S.G. Bishop, �??Excitation of Er3+ emission by host glass absorption in sputtered films of Er-doped Ge10As40Se25S25 glass,�?? Appl. Phys. Lett. 73, 3196 (1998), [CrossRef]
- D.S. Gill, R.W. Eason, C. Zaldo, H.N. Rutt, N.A. Vainos, �??Characterisation of Ga-La-S chalcogenide glass thin-film optical waveguides, fabricated by pulsed laser deposition,�?? J. Non-Cryst. Solids 191, 321-326 (1995) [CrossRef]
- J. Xu and R.M. Almeida, �??Preparation and Characterization of Germanium Sulphide Based Sol-Gel Planar Waveguides,�?? J. Sol-Gel Sci. Technol. 19, 243-248 (2000). [CrossRef]
- P. J. Melling, �??Alternative Methods of Preparing Chalcogenide Glasses,�?? Ceramic Bulletin 63, 1427-1429 (1984).
- E. Sleeckx, P. Nagels, R. Callaerts and M. Vanroy, �??Plasma-enhanced CVD of amorphous GexS1-x and GexSe1-x films,�?? J. de Physique IV 3, 419-426 (1993). [CrossRef]
- 10. A. Kovolov, �??Photo-induced Metastability in Amorphous Semiconductors,�?? 2003.
- Ihsan Barin, �??Thermochemical Data of Pure Substances,�?? third edition, 1995.
- I. P. Kotsalas and C. Raptis, �??High-temperature structural phase transitions of GexS1-x alloy studied by Raman spectroscopy,�?? Phys. Rev. B 64, 125210 (2001). [CrossRef]
- J.S. Sanghera and I.D. Aggarwal, �??Active and passive chalcogenide glass optical fibers for IR applications: a review,�?? J. Non-Cryst. Solids 256, 6-16 (1999). [CrossRef]
- R. Todorov, Tz. Iliev, and K. Petkov, �??Light-induced changes in the optical properties of thin films of Ge-S-Bi(Tl,In) chalcogenides,�?? J. Non-Cryst. Solids 326, 263-267 (2003). [CrossRef]
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