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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 12, Iss. 11 — May. 31, 2004
  • pp: 2512–2516

Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator

Maitreyee Roy, Colin J. R. Sheppard, and Parameswaran Hariharan  »View Author Affiliations


Optics Express, Vol. 12, Issue 11, pp. 2512-2516 (2004)
http://dx.doi.org/10.1364/OPEX.12.002512


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Abstract

We describe a computer-controlled low-coherence interference microscope, based on a Linnik interferometer configuration that can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The novel feature of the system is a fast, switchable achromatic phase-modulator operating on the geometric phase, using a pair of ferro-electric liquid crystal devices.

© 2004 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(170.1650) Medical optics and biotechnology : Coherence imaging
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Research Papers

History
Original Manuscript: April 21, 2004
Revised Manuscript: May 24, 2004
Published: May 30, 2004

Citation
Maitreyee Roy, Colin Sheppard, and Parameswaran Hariharan, "Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator," Opt. Express 12, 2512-2516 (2004)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-12-11-2512


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References

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