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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 11 — May. 30, 2005
  • pp: 3951–3960

Practical photoluminescence and photoreflectance spectroscopic system for optical characterization of semiconductor devices

Ching-Hwa Ho, Kuo-Wei Huang, Yu-Shyan Lin, and Der-Yuh Lin  »View Author Affiliations

Optics Express, Vol. 13, Issue 11, pp. 3951-3960 (2005)

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We present a practical experimental design for performing photoluminescence (PL) and photoreflectance (PR) measurements of semiconductors with only one PL spectroscopic system. The measurement setup is more cost efficient than typical PL-plus-PR systems. The design of the experimental setup of the PL–PR system is described in detail. Measurements of two actual device structures, a high-electron-mobility transistor (HEMT) and a double heterojunction-bipolar transistor (DHBT), are carried out by using this design. The experimental PL and PR spectra of the HEMT device, as well as polarized-photoreflectance (PPR) spectra of the DHBT structure, are analyzed in detailed and discussed. The experimental analyses demonstrate the well-behaved performance of this PL–PR design.

© 2005 Optical Society of America

OCIS Codes
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(300.6380) Spectroscopy : Spectroscopy, modulation
(300.6470) Spectroscopy : Spectroscopy, semiconductors

ToC Category:
Research Papers

Original Manuscript: February 17, 2005
Revised Manuscript: May 12, 2005
Published: May 30, 2005

Ching-Hwa Ho, Kuo-Wei Huang, Yu-Shyan Lin, and Der-Yuh Lin, "Practical photoluminescence and photoreflectance spectroscopic system for optical characterization of semiconductor devices," Opt. Express 13, 3951-3960 (2005)

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