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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 11 — May. 30, 2005
  • pp: 4230–4236

Design of two-dimensional zero reference codes by means of a global optimization method

José Saez-Landete, José Alonso, and Eusebio Bernabeu  »View Author Affiliations


Optics Express, Vol. 13, Issue 11, pp. 4230-4236 (2005)
http://dx.doi.org/10.1364/OPEX.13.004230


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Abstract

A method to obtain the absolute measure of the position is by means of the autocorrelation of two zero reference marks. In one-axis measurement systems one dimensional mark are used and the design of these marks is relatively complex. When the movement is in two-axes, two dimensional reference marks are required and they are even harder to design. We report a method of global optimization to calculate the optimal two dimensional zero reference marks which generate the reference signal with the highest central peak. This method proves to be a powerful tool for solving this problem.

© 2005 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.0230) Optical devices : Optical devices

ToC Category:
Research Papers

History
Original Manuscript: April 26, 2005
Revised Manuscript: May 19, 2005
Published: May 30, 2005

Citation
José Sáez-Landete, José Alonso, and Eusebio Bernabeu, "Design of two-dimensional zero reference codes by means of a global optimization method," Opt. Express 13, 4230-4236 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-11-4230


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References

  1. M. C. King and D. H. Berry, �??Photolithografic mask alignment using moiré techniques�?? Appl. Opt. 11, 2455-2459 (1972). [CrossRef] [PubMed]
  2. V. T. Chitnis and Y. Uchida, �??Moiré signals in reflection�?? Optics Communications 54, 207-211 (1985). [CrossRef]
  3. Xiangyang Yang and Chunyong Yin, �??A new method for the design of zero reference marks for grating measurement systems�?? J. Phys. E Sci. Instrum. 19, 34-7 (1986). [CrossRef]
  4. Li Yajun, �??Autocorrelation function of a bar code system�?? J. Mod. Opt. 34, 1571-5 (1987). [CrossRef]
  5. Li Yajun, �??Optical valve using bar codes�?? Optik 79, 67-74 (1988).
  6. J. Sáez-Landete, J. Alonso, E. Bernabeu, �??Design of zero reference codes by means of a global optimization method�?? Op. Ex. 13, 195-201 (2005), <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-1-195.">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-1-195.</a> [CrossRef]
  7. Y. Chen, W. Huang and X. Dang, �??Design and analysis of two-dimensional zero-reference marks for alignment systems�?? Review of Scientific Instruments, 74, 3549-53 (2003). [CrossRef]
  8. D. R. Jones, C. D. Perttunen, and B. E. Stuckman. �??Lipschitzian Optimization without the Lipschitz Constant�?? J. Optim. Theory Appl. 79, 157-181 (1993). [CrossRef]
  9. Donald R. Jones. DIRECT Global optimization algorithm. Encyclopedia of Optimization. (Kluwer Academic Publishers, Dordrecht, 2001).
  10. Bjorkman, Mattias and Holmstrom, Kenneth. �??Global Optimization Using the DIRECT Algorithm in Matlab�?? Advanced Modeling and Optimization, 1, 17-37 (1999).
  11. Daniel E. Finkel and C. T. Kelley. �??Convergence analysis of the DIRECT algorithm�?? Optimization Online (2004).
  12. J. M. Gablonsky. DIRECT Version 2.0 User Guide. (CRSC Technical Report, Raleigh, 2001).

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