A computer simulation for the fabrication of hexagonal micro lens arrays by use of the dragging process with an excimer laser

doi:10.1364/OPEX.13.005600

Optics Express

Editor: Michael Duncan
Vol. 13, Iss. 15 — Jul. 25, 2005
pp: 5600–5607

A computer simulation for the fabrication of hexagonal micro lens arrays by use of the dragging process with an excimer laser

Shuh-Yi Wang »View Author Affiliations

Optics Express, Vol. 13, Issue 15, pp. 5600-5607 (2005)
http://dx.doi.org/10.1364/OPEX.13.005600

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Abstract
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References (11)
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Abstract

A computer simulation for the fabrication of aspheric hexagonal micro lens arrays by use of the laser dragging process was investigated. An excimer laser dragging process is capable of manufacturing a microstructure array with a curved surface. Generally, this process was used to produce aspheric micro lens arrays with an arrangement of rectangular coordinates. The first step in the proposed dragging process is to generate micro channels whose cross-section shape is similar to that of the mask. Then the dragging procedure is repeated twice, each time after rotating the work piece by 60 deg relative to the previous channels. This hexagonal micro lens array may be used in the application of image processing. Our results show that the hexagonal micro lens array has a better axial symmetry and higher fill factor than a rectangle one.

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(230.4040) Optical devices : Mirrors

ToC Category:
Research Papers

History
Original Manuscript: March 18, 2005
Revised Manuscript: June 26, 2005
Published: July 25, 2005

Citation
Shuh-Yi Wang, "A computer simulation for the fabrication of hexagonal micro lens arrays by use of the dragging process with an excimer laser," Opt. Express 13, 5600-5607 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-15-5600

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References

B. Ezell, �??Making microlens backlights grow up,�?? Information Display 5, 21-26 (2001).
H. P. Herzig, Micro-Optics (Taylor & Francis, 1997).
N. F. Borrelli, Microoptics Technology (Marcel Dekker, 1999).
P. E. Dyer, �??Excimer laser polymer ablation: twenty years,�?? Appl. Phys. A 77, 167-173 (2003).
N. H. Rizvi, �??Production of novel 3D microstructures using excimer laser mask projection techniques,�?? Proc. SPIE 3680, 546-552 (1999). [CrossRef]
P. T. Rumsby, E.C. Harvey and D.W. Thomas, �??Laser Microprojection for micromechanical device fabrication,�?? Proc. SPIE 2921, 684-692 (1997). [CrossRef]
E. C. Harvey, P. T. Rumsby, M. C. Gower, and J. L. Remnant, �??Microstructing by excimer laser,�?? Proc. SPIE 2639, 266-277 (1995). [CrossRef]
K. Zimmer and F. Bigl, �?? Micro structuring of surfaces by excimer laser machining,�?? Proc. SENSOR �??95, 779-782 (1995).
K. Zimmer, D. Hirsch and F. Bigl,�?? Excimer laser machining for the fabrication of analogous microstructures,�?? Appl. Surf. Sci. 96, 425-429 (1995). [CrossRef]
K. Naessens, H. Ottevaere, R. Baets, P. V. Daele, and H. Thienpont, �??Direct writing of microlenses in polycarbonate with excimer laser ablation,�?? Appl. Opt. 42, 6349-6359 (2003). [CrossRef] [PubMed]
H. K. Tonshoff et al., �??NC-controlled production of smooth 3D surfaces in brittle materials with 193 nm excimer laser,�?? Proc. SPIE 3511, 56-66 (1998). [CrossRef]

Appl. Opt.

K. Naessens, H. Ottevaere, R. Baets, P. V. Daele, and H. Thienpont, �??Direct writing of microlenses in polycarbonate with excimer laser ablation,�?? Appl. Opt. 42, 6349-6359 (2003). [CrossRef] [PubMed]

Appl. Phys. A

P. E. Dyer, �??Excimer laser polymer ablation: twenty years,�?? Appl. Phys. A 77, 167-173 (2003).

Appl. Surf. Sci.

K. Zimmer, D. Hirsch and F. Bigl,�?? Excimer laser machining for the fabrication of analogous microstructures,�?? Appl. Surf. Sci. 96, 425-429 (1995). [CrossRef]

Information Display

B. Ezell, �??Making microlens backlights grow up,�?? Information Display 5, 21-26 (2001).

Proc. SENSOR

K. Zimmer and F. Bigl, �?? Micro structuring of surfaces by excimer laser machining,�?? Proc. SENSOR �??95, 779-782 (1995).

Proc. SPIE

N. H. Rizvi, �??Production of novel 3D microstructures using excimer laser mask projection techniques,�?? Proc. SPIE 3680, 546-552 (1999). [CrossRef]
P. T. Rumsby, E.C. Harvey and D.W. Thomas, �??Laser Microprojection for micromechanical device fabrication,�?? Proc. SPIE 2921, 684-692 (1997). [CrossRef]
E. C. Harvey, P. T. Rumsby, M. C. Gower, and J. L. Remnant, �??Microstructing by excimer laser,�?? Proc. SPIE 2639, 266-277 (1995). [CrossRef]
H. K. Tonshoff et al., �??NC-controlled production of smooth 3D surfaces in brittle materials with 193 nm excimer laser,�?? Proc. SPIE 3511, 56-66 (1998). [CrossRef]

Other

H. P. Herzig, Micro-Optics (Taylor & Francis, 1997).
N. F. Borrelli, Microoptics Technology (Marcel Dekker, 1999).

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