OSA's Digital Library

Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 18 — Sep. 5, 2005
  • pp: 7070–7075

Mathematical model of spin-coated photoresist on a spherical substrate

Xiao-guo Feng and Lian-chun Sun  »View Author Affiliations


Optics Express, Vol. 13, Issue 18, pp. 7070-7075 (2005)
http://dx.doi.org/10.1364/OPEX.13.007070


View Full Text Article

Acrobat PDF (91 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present the final film thickness�?? expression of spin-coated photoresist on a spherical substrate. Firstly, some reasonable assumptions are put forward for a concise derivation process. Then, on the basis of the motion equation of spin-coated photoresist on a plane, considering the spherical surface shape, we put forward the motion equation of spin-coated photoresist on a spherical substrate. So two evolution equations of film thickness and radial position are derived, and the expression of initial film thickness evolution in a radial position is also gained. Finally, considering some effects of solvent volatilization, we gain the expression of final film thickness. The experiment result indicates that the expression is accurate.

© 2005 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings

ToC Category:
Research Papers

History
Original Manuscript: July 26, 2005
Revised Manuscript: August 26, 2005
Published: September 5, 2005

Citation
Xiao-guo Feng and Lian-chun Sun, "Mathematical model of spin-coated photoresist on a spherical substrate," Opt. Express 13, 7070-7075 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-18-7070


Sort:  Journal  |  Reset

References

  1. J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, �??Measurement of a convex secondary mirrorusing a holographic test plat,�?? in Proc. SPIE 2199, 193-198 (1994).
  2. Yongjun XIE, Zhenwu LU, Fengyou LI, Jingli ZHAO and Zhicheng WENG, �??Lithographic fabrication of large diffractive optical elements on a concave lens surface,�?? Opt. Express 10, 1043-1047 (2002).
  3. S.B.G. O�??Brien and L.W. Schwartz, �??Theory and modeling of thin film flows,�?? Encyclopedia of Surface and Colloid Science, Marcel Dekker, New York, 5283-5297 (2002).
  4. T. G. Myers and J. P. F. Charpin, �??The effect of the coriolis force on axisymmetric rotating thin film flows,�?? Int. J. Non-linear Mech. 36, 629-635 (2001).
  5. A. G. Emslie, F.T. Bonner, L.G. Peck, �??Flow of a viscous liquid on a rotating disk,�?? J. Appl. Phys. 29, 858-862 (1958). [CrossRef]
  6. A. Acrivos, M. J. Shah, and E. E. Petersen, �??On the flow of a non-newtonian liquid on a rotating disk,�?? J. Appl. Phys. 31, 963-968 (1960). [CrossRef]
  7. D. Meyerhofer, �??Characteristics of resist films produced by spinning,�?? J. Appl. Phys. 49, 3993-3997 (1978). [CrossRef]
  8. Hongda Yue, Longfa Pan, Yuejing Bin, et al, �??Mechanics analysis in CD-R dye coating process,�?? Proc. SPIE 4930, 253-257 (2002).
  9. Peter C. Sukanek, �??Spin Coating,�?? J. Imaging Technol. 11, 184-190 (1985).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited