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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 18 — Sep. 5, 2005
  • pp: 7160–7173

Super-resolution Fourier transform method in phase shifting interferometry

Rajesh Langoju, Abhijit Patil, and Pramod Rastogi  »View Author Affiliations


Optics Express, Vol. 13, Issue 18, pp. 7160-7173 (2005)
http://dx.doi.org/10.1364/OPEX.13.007160


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Abstract

The paper proposes a super-resolution Fourier transform method for phase estimation in phase shifting interferometry. Incorporation of a super-resolution technique before the application of Fourier transform significantly enhances the resolution capability of the proposed method. The other salient features of the method lie in its ability to handle multiple harmonics, PZT miscalibration, and arbitrary phase steps in the optical configuration. The method does not need addition of any carrier fringes to separate the spectral contents in the intensity fringes. The proposed concept thus overcomes the limitations of other methods based on Fourier transform techniques. The robustness of the proposed method is studied in the presence of noise.

© 2005 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Research Papers

History
Original Manuscript: August 1, 2005
Revised Manuscript: August 28, 2005
Published: September 5, 2005

Citation
Rajesh Langoju, Abhijit Patil, and Pramod Rastogi, "Super-resolution Fourier transform method in phase shifting interferometry," Opt. Express 13, 7160-7173 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-18-7160


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