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Optics Express

Optics Express

  • Editor: Micha
  • Vol. 13, Iss. 23 — Nov. 14, 2005
  • pp: 9605–9611

Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique

Ngoc Diep Lai, Wen Ping Liang, Jian Hung Lin, Chia Chen Hsu, and Cheng Hsiung Lin  »View Author Affiliations

Optics Express, Vol. 13, Issue 23, pp. 9605-9611 (2005)

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A simple and efficient optical interference method for fabricating high quality two- and three-dimensional (2D and 3D) periodic structures is demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures are created depending on the number of exposure and the rotation angle of the sample for each exposure. Square and hexagonal 2D structures are fabricated by a multi-exposure of two-beam interference pattern with a rotation angle of 90° and 60° between two different exposures, respectively. Three-exposure, in particular, results in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. The experimental results obtained with SU-8 photoresist are well in agreement with the theoretical predictions. Multi-exposure of two-beam interference technique should be very useful for fabrication of photonic crystals.

© 2005 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference

ToC Category:
Research Papers

Original Manuscript: October 7, 2005
Revised Manuscript: November 7, 2005
Published: November 14, 2005

Ngoc Diep Lai, Wen Ping Liang, Jian Hung Lin, Chia Chen Hsu, and Cheng Hsiung Lin, "Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique," Opt. Express 13, 9605-9611 (2005)

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  1. E. Yablonovitch, �??Inhibited spontaneous emission in solid-state physics and electronics,�?? Phys. Rev. Lett. 58, 2059-2062 (1987) [CrossRef] [PubMed]
  2. S. John, �??Strong localization of photons in certain disordered dielectric superlattices,�?? Phys. Rev. Lett. 58, 2486-2489 (1987). [CrossRef] [PubMed]
  3. Y. A. Vlasov, X. Z. Bo, J. C. Sturm, D. J. Norris, �??On-chip natural assembly of silicon photonic bandgap crystals,�?? Nature 414, 289-293 (2001). [CrossRef] [PubMed]
  4. Y. -H. Ye, S. Badilescu, V. -V. Truong, �??Large-scale ordered macroporous SiO2 thin films by a template-directed method,�?? Appl. Phys. Lett. 81, 616-618 (2002). [CrossRef]
  5. V. Berger, O. Gauthier-Lafaye, E. Costard, �??Photonic band gaps and holography,�?? J. Appl. Phys. 82, 60-64 (1997). [CrossRef]
  6. M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, A. J. Turberfield, �??Fabrication of photonic crystals for the visible spectrum by holographic lithography,�?? Nature 404, 53-56 (2000). [CrossRef] [PubMed]
  7. S. Shoji, S. Kawata, �??Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin,�?? Appl. Phys. Lett. 76, 2668-2670 (2000). [CrossRef]
  8. A. Shishido, I. B. Diviliansky, I. C. Khoo, T. S. Mayer, S. Nishimura, G. L. Egan, T. E. Mallouk, �??Direct fabrication of two-dimensional titania arrays using interference photolithography,�?? Appl. Phys. Lett. 79, 3332-3334 (2001). [CrossRef]
  9. T. Kondo, S. Matsuo, S. Juodkazis, H. Misawa, �??Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,�?? Appl. Phys. Lett. 79, 725-727 (2001). [CrossRef]
  10. V. P. Tondiglia, L. V. Natarajan, R. L. Sutherland, D. Tomlin, T. J. Bunning, �??Holographic formation of electro-optical polymer-liquid crystal photonic crystals,�?? Adv. Mater. 14, 187-191 (2002). [CrossRef]
  11. Y. V. Miklyaev, D. C. Meisel, A. Blanco, G. V. Freymann, K. Busch, W. Koch, C. Enkrich, M. Deubel, M. Wegener, �??Three-dimensional face-centered-cubic photonic crystal templates by laser holography: fabrication, optical characterization, and band-structure calculations,�?? Appl. Phys. Lett. 82, 1284-1286 (2003). [CrossRef]
  12. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, H. Misawa, �??Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,�?? Appl. Phys. Lett. 82, 2758-2760 (2003). [CrossRef]
  13. Y. C. Zhong, S. A. Zhu, H. M. Su, H. Z. Wang, J. M. Chen, Z. H. Zeng, Y. L. Chen, �??Photonic crystal with diamondlike structure fabricated by holographic lithography,�?? Appl. Phys. Lett. 87, 061103 (2005). [CrossRef]
  14. H. B. Sun, S. Matsuo, H. Misawa, �??Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin,�?? Appl. Phys. Lett. 74, 786-788 (1999). [CrossRef]
  15. M. Straub, M. Gu, �??Near-infrared photonic crystals with higher-order bandgaps generated by two-photon photopolymerization,�?? Opt. Lett. 27, 1824-1826 (2002). [CrossRef]
  16. V. Mizeikis, K. K. Seet, S. Juodkazis, H. Misawa, �??Three-dimensional woodpile photonic crystal templates for the infrared spectral range,�?? Opt. Lett. 29, 2061-2063 (2004) [CrossRef] [PubMed]
  17. M. Deubel, G. V. Freymann, M. Wegener, S. Pereira, K. Busch, C. M. Soukoulis, �??Direct laser writing of three-dimensionalphotonic-crystal templates for telecommunications,�?? Nature Mater. 3, 444-447 (2004). [CrossRef]
  18. X. Yang, L. Cai, Q. Liu, �??Polarization optimization in the interference of four umbrellalike symmetric beams for making three-dimensional periodic microstructures,�?? Appl. Opt. 32, 6894-6900 (2002). [CrossRef]
  19. H. M. Su, Y. C. Zhong, X. Wang, X. G. Zheng, J. F. Xu, H. Z. Wang, �??Effects of polarization on laser holography for microstructure fabrication,�?? Phys. Rev. E 67, 056619 (2003). [CrossRef]
  20. S. C. Kitson, W. L. Barnes, J. R. Sambles, �?? The fabrication of submicron hexagonal arrays using multiple-exposure optical interferometry,�?? IEEE Photon. Technol. Lett. 8, 1662-1664 (1996). [CrossRef]
  21. L. Pang, W. Nakagawa, Y. Fainman:, �??Fabrication of two-dimensional photonic crystals with controlled defects by use of multiple exposures and direct write,�?? Appl. Opt. 42, 5450-5456 (2003). [CrossRef] [PubMed]
  22. N. D. Lai, W. P. Liang, J. H. Lin, C. C. Hsu, �??Rapid fabrication of large-area periodic structures containing well-defined defects by combining holography and mask techniques,�?? Opt. Express 13, 5331-5337 (2005), <a href= "http://www.opticsinfobase.org/abstract.cfm?id=84897">http://www.opticsinfobase.org/abstract.cfm?id=84897</a> [CrossRef] [PubMed]
  23. C. K. Ullal, M. Maldovan, E. L. Thomas, G. Chen, Y. -J. Han, S. Yang, �??Photonic crystals through holographic lithography: Simple cubic, diamond-like, and gyroid-like structures,�?? Appl. Phys. Lett. 84, 5434-5436 (2004). [CrossRef]

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