Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses
Optics Express, Vol. 13, Issue 6, pp. 1855-1859 (2005)
http://dx.doi.org/10.1364/OPEX.13.001855
Enhanced HTML 
Acrobat PDF (366 KB)
Abstract
Longitudinal and transverse microholes are drilled in soda-lime glass by water-assisted ablation with femtosecond laser pulses. True three-dimensional microchannels consisting of longitudinal and transverse microholes are presented. At low incident pulse energy, only one transverse microhole is observed. At high incident pulse energy, multiple transverse microholes can be simultaneously drilled. Using a focusing lens with numerical aperture of 0.5, two, three and four transverse microholes are fabricated at 3.2, 4.9 and 9.3µJ/pulse, which is qualitatively explained by the multiple foci process.
© 2005 Optical Society of America
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena
ToC Category:
Research Papers
History
Original Manuscript: January 24, 2005
Revised Manuscript: February 26, 2005
Published: March 21, 2005
Citation
Ran An, Yan Li, Yanping Dou, Hong Yang, and Qihuang Gong, "Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses," Opt. Express 13, 1855-1859 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-6-1855
Sort: Journal | Reset
References
- Y. Kondo, J. R. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, �??Three-dimensional microdrilling of glass by multiphoton process and chemical etching,�?? Jpn. J. Appl. Phys. 38, L1146-L1148 (1999). [CrossRef]
- M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, �??3-D microstructuring inside photosensitive glass by femtosecond laser excitation,�?? Appl. Phys. A, 76, 857-860 (2003). [CrossRef]
- Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, �??Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,�?? Opt. Lett. 28, 55-57 (2003). [CrossRef] [PubMed]
- A. Marcinkevièius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, �??Femtosecond laser-assisted three-dimensional microfabrication in silica,�?? Opt. Lett. 26, 277-279 (2001). [CrossRef]
- Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, �??Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,�?? Opt. Lett. 26, 1912-1914 (2001). [CrossRef]
- L. Shah, J. Tawney, M. Richardson, and K. Richardson, �??Femtosecond laser deep hole drilling of silicate glasses in air,�?? Appl. Surf. Sci. 183, 151-164 (2001). [CrossRef]
- A. Zoubir, L. Shah, K. Richardson, and M. Richardson, �??Practical uses of femtosecond laser micro-materials processing,�?? Appl. Phys. A 77, 311-315 (2003).
- R. An, Y. Li, Y. P. Dou, Y. Fang, H. Yang and Q. H. Gong, �??Laser micro-hole drilling of soda-lime glass with femtosecond pulses,�?? Chin. Phys. Lett. 21, 2465-2468 (2004). [CrossRef]
- D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, �??Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,�?? Appl. Phys. A 79, 605-612 (2004). [CrossRef]
- H.C. Guo, H. B. Jiang, Y. Fang, C. Peng, H. Yang, Y. Li, Q. H. Gong, �??Pulse duration dependence of femtosecond laser induced refractive index modulation in fused silica,�?? J. Opt. A 6, 787- 790 (2004). [CrossRef]
- Z. X. Wu, H. B. Jiang, Q. Sun, H. Yang, and Q. H. Gong, �??Filamentation and temporal reshaping of a femtosecond pulse in fuse silica,�?? Phys. Rev. A 68,063820 (2003). [CrossRef]
- Z. X. Wu, H. B. Jiang, L. Luo, H. C. Guo, H. Yang, and Q. H. Gong, �??Multiple foci and a long filament observed with focused femtosecond pulse propagation in fused silica,�?? Opt. Lett. 27, 448-450 (2002). [CrossRef]
- N. Aközbek, C. M. Bowden, A. Talebpour, and S. L. Chin, �??Femtosecond pulse propagation in air: Variational analysis,�?? Phys. Rev. E 61, 4540-4549 (2000). [CrossRef]
- S. H. Wiersma, P. Török, T. D. Visser, and P. Varga, �??Comparison of different theories for focusing through a plane interface,�?? J. Opt. Soc. Am. A 14, 1482-1490 (1997). [CrossRef]
Cited By |
 Alert me when this paper is cited |
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.
Related Journal Articles 
- Microstructuring transparent materials by use of nondiffracting ultrashort pulse beams generated by diffractive optics (JOSAB)
- Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses (OE)
- Femtosecond laser microfabrication of micro-optic elements in glass (COL)
- Ultrafast laser photoinscription of polarization sensitive devices in bulk silica glass (OE)
- Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica (OL)
Related Conference Papers
- Enhancement of Laser Nano-Patterning of Semiconductors: Direct Ablation of PMMA Coated Silicon
- Three-Dimensional Micromachining Inside Transparent Materials Using Femtosecond Laser Pulses: New Applications
- Burst-mode femtosecond ablation in copper and Lexan
- Wavelength dependence of femtosecond laser ablation threshold for InP in the 400–2200 nm range
- Micro-Channels in Conventional Single-Mode Fibers for Refractive Index Sensing Applications
« Previous Article | Next Article »
OSA is a member of 