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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 6 — Mar. 21, 2005
  • pp: 1855–1859

Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses

Ran An, Yan Li, Yanping Dou, Hong Yang, and Qihuang Gong  »View Author Affiliations


Optics Express, Vol. 13, Issue 6, pp. 1855-1859 (2005)
http://dx.doi.org/10.1364/OPEX.13.001855


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Abstract

Longitudinal and transverse microholes are drilled in soda-lime glass by water-assisted ablation with femtosecond laser pulses. True three-dimensional microchannels consisting of longitudinal and transverse microholes are presented. At low incident pulse energy, only one transverse microhole is observed. At high incident pulse energy, multiple transverse microholes can be simultaneously drilled. Using a focusing lens with numerical aperture of 0.5, two, three and four transverse microholes are fabricated at 3.2, 4.9 and 9.3µJ/pulse, which is qualitatively explained by the multiple foci process.

© 2005 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena

ToC Category:
Research Papers

History
Original Manuscript: January 24, 2005
Revised Manuscript: February 26, 2005
Published: March 21, 2005

Citation
Ran An, Yan Li, Yanping Dou, Hong Yang, and Qihuang Gong, "Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses," Opt. Express 13, 1855-1859 (2005)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-6-1855


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References

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