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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 13, Iss. 6 — Mar. 21, 2005
  • pp: 1855–1859

Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses

Ran An, Yan Li, Yanping Dou, Hong Yang, and Qihuang Gong  »View Author Affiliations

Optics Express, Vol. 13, Issue 6, pp. 1855-1859 (2005)

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Longitudinal and transverse microholes are drilled in soda-lime glass by water-assisted ablation with femtosecond laser pulses. True three-dimensional microchannels consisting of longitudinal and transverse microholes are presented. At low incident pulse energy, only one transverse microhole is observed. At high incident pulse energy, multiple transverse microholes can be simultaneously drilled. Using a focusing lens with numerical aperture of 0.5, two, three and four transverse microholes are fabricated at 3.2, 4.9 and 9.3µJ/pulse, which is qualitatively explained by the multiple foci process.

© 2005 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena

ToC Category:
Research Papers

Original Manuscript: January 24, 2005
Revised Manuscript: February 26, 2005
Published: March 21, 2005

Ran An, Yan Li, Yanping Dou, Hong Yang, and Qihuang Gong, "Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses," Opt. Express 13, 1855-1859 (2005)

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  1. Y. Kondo, J. R. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, �??Three-dimensional microdrilling of glass by multiphoton process and chemical etching,�?? Jpn. J. Appl. Phys. 38, L1146-L1148 (1999). [CrossRef]
  2. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, �??3-D microstructuring inside photosensitive glass by femtosecond laser excitation,�?? Appl. Phys. A, 76, 857-860 (2003). [CrossRef]
  3. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, �??Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,�?? Opt. Lett. 28, 55-57 (2003). [CrossRef] [PubMed]
  4. A. Marcinkevièius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, �??Femtosecond laser-assisted three-dimensional microfabrication in silica,�?? Opt. Lett. 26, 277-279 (2001). [CrossRef]
  5. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, �??Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,�?? Opt. Lett. 26, 1912-1914 (2001). [CrossRef]
  6. L. Shah, J. Tawney, M. Richardson, and K. Richardson, �??Femtosecond laser deep hole drilling of silicate glasses in air,�?? Appl. Surf. Sci. 183, 151-164 (2001). [CrossRef]
  7. A. Zoubir, L. Shah, K. Richardson, and M. Richardson, �??Practical uses of femtosecond laser micro-materials processing,�?? Appl. Phys. A 77, 311-315 (2003).
  8. R. An, Y. Li, Y. P. Dou, Y. Fang, H. Yang and Q. H. Gong, �??Laser micro-hole drilling of soda-lime glass with femtosecond pulses,�?? Chin. Phys. Lett. 21, 2465-2468 (2004). [CrossRef]
  9. D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, �??Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,�?? Appl. Phys. A 79, 605-612 (2004). [CrossRef]
  10. H.C. Guo, H. B. Jiang, Y. Fang, C. Peng, H. Yang, Y. Li, Q. H. Gong, �??Pulse duration dependence of femtosecond laser induced refractive index modulation in fused silica,�?? J. Opt. A 6, 787- 790 (2004). [CrossRef]
  11. Z. X. Wu, H. B. Jiang, Q. Sun, H. Yang, and Q. H. Gong, �??Filamentation and temporal reshaping of a femtosecond pulse in fuse silica,�?? Phys. Rev. A 68,063820 (2003). [CrossRef]
  12. Z. X. Wu, H. B. Jiang, L. Luo, H. C. Guo, H. Yang, and Q. H. Gong, �??Multiple foci and a long filament observed with focused femtosecond pulse propagation in fused silica,�?? Opt. Lett. 27, 448-450 (2002). [CrossRef]
  13. N. Aközbek, C. M. Bowden, A. Talebpour, and S. L. Chin, �??Femtosecond pulse propagation in air: Variational analysis,�?? Phys. Rev. E 61, 4540-4549 (2000). [CrossRef]
  14. S. H. Wiersma, P. Török, T. D. Visser, and P. Varga, �??Comparison of different theories for focusing through a plane interface,�?? J. Opt. Soc. Am. A 14, 1482-1490 (1997). [CrossRef]

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