Effect of fabrication errors on superresolution property of a pupil filter

doi:10.1364/OE.14.007024

Effect of fabrication errors on superresolution property of a pupil filter

Weiqian Zhao, Lirong Qiu, and Zhengde Feng »View Author Affiliations

Optics Express, Vol. 14, Issue 16, pp. 7024-7036 (2006)
http://dx.doi.org/10.1364/OE.14.007024

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Abstract

Three analytical models have been established for superresolution parameters G_Ae , G_Te , and S_e related to transmission function A(ρ), phase function of ϕ(ρ), and the structural parameters with fabrication errors of an N-zone circular-symmetrical superresolution pupil filter. These new models established, directly relate the superresolution parameters of an N-zone super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design, and fabrication of an N-zone super-resolution pupil filter. The models established for G_Ae , G_Te , and S_e have been used to analyze the effect of the fabrication errors of a three-zone phase-only pupil filter on its superresolution property, to verify their validities.

OCIS Codes
(100.6640) Image processing : Superresolution
(120.2440) Instrumentation, measurement, and metrology : Filters

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 11, 2006
Revised Manuscript: June 28, 2006
Manuscript Accepted: July 14, 2006
Published: August 7, 2006

Citation
Weiqian Zhao, Lirong Qiu, and Zhengde Feng, "Effect of fabrication errors on superresolution property of a pupil filter," Opt. Express 14, 7024-7036 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-16-7024

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References

T. Wilson, Confocal Microscopy (Academic Press. London, 1990).
<jrn>L. R. Qiu, W. Q. Zhao, Z. D. Feng, and X. M. Ding, "An approach to higher spatial resolution in a laser probe measurement system using a phase-only pupil filter," Opt. Eng. 45 (to be published).</jrn>
M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, "Three-dimensional superresolution by annular binary filters," Opt. Commun. 165, 267-278 (1999). [CrossRef]
C. J. R. Sheppard and A. Choudhury, "Annular pupil, radial polarization, and superresolution," Appl. Opt. 43, 4322-4327 (2004). [CrossRef] [PubMed]
W. Q. Zhao, J. B. Tan, and L. R. Qiu, "Bipolar absolute differential confocal approach to higher spatial resolution," Opt. Express 12, 5013-5021 (2004). [CrossRef] [PubMed]
T. R. M. Sales, Phase-only Superresolution Elements (University of Rochester. Ph.D. Dissertation, 1997).
C. J. R. Sheppard and Z. S. Hegedus, "Axial behaviour of pupil-plane filters," J. Opt. Soc. Am. A 5, 643-647 (1988). [CrossRef]
T. R. M. Sales and G. M. Morris, "Diffractive superresolution elements," J. Opt. Soc. Am. A 14, 1637-1646 (1997). [CrossRef]
D. M. de Juana, J. E. Oti, V. F. Canales, and M. P. Caqiqal, "Design of superresolving continuous phase filters, " Opt. Lett. 28, 607-609 (2003). [CrossRef] [PubMed]
S. Ledesma, J. Campos, J. C. Escalera, and M. J. Yzuel, "Simple expressions for performance parameters of complex filters with application to super- Gaussian phase filter," Opt. Lett. 29, 932-934(2004). [CrossRef] [PubMed]
H. T. Liu, Y. B. Yan, D. Yi, and G. F. Jin. "Design of three-dimensional superresolution filters and limits of axial optical supperresolution," Appl. Opt. 42, 1463-1476 (2003). [CrossRef] [PubMed]
H. T. Liu, Y. B. Yan, Q. F. Tan, and G. F. Jin, "Theories for the design of diffractive superresolution elements and limits of optical superresolution," Opt. Soc. Am. A 19, 2185-2193 (2002). [CrossRef]
M. Y. Yun, L. R. Liu, J. F. Sun, and D. A. Liu, "Three-dimension superresolution by three-zone complex pupil filters," Opt. Soc. Am. A 22, 272-277 (2005). [CrossRef]
M. L. Melocchi, Phase apodization for resolution enhancement (Ph.D. Dissertation, University of Rochester, 2003).

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[1] T. Wilson, Confocal Microscopy (Academic Press. London, 1990).

[2] <jrn>L. R. Qiu, W. Q. Zhao, Z. D. Feng, and X. M. Ding, "An approach to higher spatial resolution in a laser probe measurement system using a phase-only pupil filter," Opt. Eng. 45 (to be published).</jrn>

[3] M. Martinez-Corral, P. Andres, C. J. Zapata-Rodriguez, and M. Kowalczyk, "Three-dimensional superresolution by annular binary filters," Opt. Commun. 165, 267-278 (1999). [CrossRef]

[4] C. J. R. Sheppard and A. Choudhury, "Annular pupil, radial polarization, and superresolution," Appl. Opt. 43, 4322-4327 (2004). [CrossRef] [PubMed]

[5] W. Q. Zhao, J. B. Tan, and L. R. Qiu, "Bipolar absolute differential confocal approach to higher spatial resolution," Opt. Express 12, 5013-5021 (2004). [CrossRef] [PubMed]

[6] T. R. M. Sales, Phase-only Superresolution Elements (University of Rochester. Ph.D. Dissertation, 1997).

[7] C. J. R. Sheppard and Z. S. Hegedus, "Axial behaviour of pupil-plane filters," J. Opt. Soc. Am. A 5, 643-647 (1988). [CrossRef]

[8] T. R. M. Sales and G. M. Morris, "Diffractive superresolution elements," J. Opt. Soc. Am. A 14, 1637-1646 (1997). [CrossRef]

[9] D. M. de Juana, J. E. Oti, V. F. Canales, and M. P. Caqiqal, "Design of superresolving continuous phase filters, " Opt. Lett. 28, 607-609 (2003). [CrossRef] [PubMed]

[10] S. Ledesma, J. Campos, J. C. Escalera, and M. J. Yzuel, "Simple expressions for performance parameters of complex filters with application to super- Gaussian phase filter," Opt. Lett. 29, 932-934(2004). [CrossRef] [PubMed]

[11] H. T. Liu, Y. B. Yan, D. Yi, and G. F. Jin. "Design of three-dimensional superresolution filters and limits of axial optical supperresolution," Appl. Opt. 42, 1463-1476 (2003). [CrossRef] [PubMed]

[12] H. T. Liu, Y. B. Yan, Q. F. Tan, and G. F. Jin, "Theories for the design of diffractive superresolution elements and limits of optical superresolution," Opt. Soc. Am. A 19, 2185-2193 (2002). [CrossRef]

[13] M. Y. Yun, L. R. Liu, J. F. Sun, and D. A. Liu, "Three-dimension superresolution by three-zone complex pupil filters," Opt. Soc. Am. A 22, 272-277 (2005). [CrossRef]

[14] M. L. Melocchi, Phase apodization for resolution enhancement (Ph.D. Dissertation, University of Rochester, 2003).

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Effect of fabrication errors on superresolution property of a pupil filter