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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 16 — Aug. 7, 2006
  • pp: 7024–7036

Effect of fabrication errors on superresolution property of a pupil filter

Weiqian Zhao, Lirong Qiu, and Zhengde Feng  »View Author Affiliations

Optics Express, Vol. 14, Issue 16, pp. 7024-7036 (2006)

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Three analytical models have been established for superresolution parameters GAe , GTe , and Se related to transmission function A(ρ), phase function of ϕ(ρ), and the structural parameters with fabrication errors of an N-zone circular-symmetrical superresolution pupil filter. These new models established, directly relate the superresolution parameters of an N-zone super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design, and fabrication of an N-zone super-resolution pupil filter. The models established for GAe , GTe , and Se have been used to analyze the effect of the fabrication errors of a three-zone phase-only pupil filter on its superresolution property, to verify their validities.

© 2006 Optical Society of America

OCIS Codes
(100.6640) Image processing : Superresolution
(120.2440) Instrumentation, measurement, and metrology : Filters

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 11, 2006
Revised Manuscript: June 28, 2006
Manuscript Accepted: July 14, 2006
Published: August 7, 2006

Weiqian Zhao, Lirong Qiu, and Zhengde Feng, "Effect of fabrication errors on superresolution property of a pupil filter," Opt. Express 14, 7024-7036 (2006)

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