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Optics Express

Optics Express

  • Editor: Michael Duncan
  • Vol. 14, Iss. 17 — Aug. 21, 2006
  • pp: 7678–7685

Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film

P. Hlubina, D. Ciprian, J. Luňáňek, and M. Lesňák  »View Author Affiliations


Optics Express, Vol. 14, Issue 17, pp. 7678-7685 (2006)
http://dx.doi.org/10.1364/OE.14.007678


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Abstract

We present a white-light spectral interferometric technique for measuring the absolute spectral optical path difference (OPD) between the beams in a slightly dispersive Michelson interferometer with a thin-film structure as a mirror. We record two spectral interferograms to obtain the spectral interference signal and retrieve from it the spectral phase, which includes the effect of a cube beam splitter and the phase change on reflection from the thin-film structure. Knowing the effective thickness and dispersion of the beam splitter made of BK7 optical glass, we use a simple procedure to determine both the absolute spectral phase difference and OPD. The spectral OPD is measured for a uniform SiO2 thin film on a silicon wafer and is fitted to the theoretical spectral OPD to obtain the thin-film thickness. The theoretical spectral OPD is determined provided that the optical constants of the thin-film structure are known. We measure also the nonlinear-like spectral phase and fit it to the theoretical values in order to obtain the thin-film thickness.

© 2006 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(240.0310) Optics at surfaces : Thin films

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 2, 2006
Revised Manuscript: June 16, 2006
Manuscript Accepted: July 12, 2006
Published: August 21, 2006

Citation
P. Hlubina, D. Ciprian, J. Lunácek, and M. Lesnák, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678-7685 (2006)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-14-17-7678


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