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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 15 — Jul. 23, 2007
  • pp: 9444–9449

Simulation-based approach for the accurate fabrication of blazed grating structures by FIB

Heung-Bae Kim, Gerhard Hobler, Andreas Steiger, Alois Lugstein, and Emmerich Bertagnolli  »View Author Affiliations


Optics Express, Vol. 15, Issue 15, pp. 9444-9449 (2007)
http://dx.doi.org/10.1364/OE.15.009444


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Abstract

Accurate direct fabrication of diffractive gratings is an important task in optical engineering. Several methods have been reported to realize optical diffractive gratings on a silicon substrate using focused ion beams. A method, however, is necessary to improve the overall shape and dimensional accuracy. In this paper a simulation-based technique is presented taking into account redeposition fluxes. First, the influence of the process parameters on the blazed grating structure is studied experimentally. Then the process parameters for a structure with a planar sidewall, a maximum depth of 200 nm, and an opening width of 350 nm are determined. The approach is finally verified by comparing the designed with the fabricated structure. The method may be readily extended to various micro/nano structures in optics.

© 2007 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: May 24, 2007
Revised Manuscript: June 14, 2007
Manuscript Accepted: June 14, 2007
Published: July 16, 2007

Citation
Heung-Bae Kim, Gerhard Hobler, Andreas Steiger, Alois Lugstein, and Emmerich Bertagnolli, "Simulation-based approach for the accurate fabrication of blazed grating structures by FIB," Opt. Express 15, 9444-9449 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-15-9444


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References

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