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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 19 — Sep. 17, 2007
  • pp: 12197–12205

Subsurface damage in precision ground ULE® and Zerodur® surfaces

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D.D. Walker  »View Author Affiliations

Optics Express, Vol. 15, Issue 19, pp. 12197-12205 (2007)

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The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamics’ related.

© 2007 Optical Society of America

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(220.4610) Optical design and fabrication : Optical fabrication
(240.5770) Optics at surfaces : Roughness
(350.1260) Other areas of optics : Astronomical optics
(350.1820) Other areas of optics : Damage
(350.3850) Other areas of optics : Materials processing

ToC Category:

Original Manuscript: July 23, 2007
Revised Manuscript: September 7, 2007
Manuscript Accepted: September 8, 2007
Published: September 11, 2007

X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. D. Walker, "Subsurface damage in precision ground ULE® and Zerodur® surfaces," Opt. Express 15, 12197-12205 (2007)

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