OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 20 — Oct. 1, 2007
  • pp: 13318–13329

Optics InfoBase > Optics Express > Volume 15 > Issue 20 > Page 13318

Optical characterization of extremely small volumes of liquid in sub-micro-holes by simultaneous reflectivity, ellipsometry and spectrometry

M. Holgado, R. Casquel, B. Sánchez, C. Molpeceres, M. Morales, and J. L. Ocaña  »View Author Affiliations


Optics Express, Vol. 15, Issue 20, pp. 13318-13329 (2007)
http://dx.doi.org/10.1364/OE.15.013318


View Full Text Article

Enhanced HTML    Acrobat PDF (1807 KB)


Advanced Search

Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We have fabricated and characterized a lattice of submicron cone-shaped holes on a SiO2/Si wafer. Reflectivity profiles as a function of angle of incidence and polarization, phase shift and spectrometry are obtained for several fluids with different refractive indexes filling the holes. The optical setup allows measuring in the center of a single hole and collecting all data simultaneously, which can be applied for measuring extremely low volumes of fluid (in the order of 0.1 femtolitres) and label-free immunoassays, as it works as a refractive index sensor. A three layer film stack model is defined to perform theoretical calculations.

© 2007 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(130.0130) Integrated optics : Integrated optics
(130.6010) Integrated optics : Sensors
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 11, 2007
Revised Manuscript: July 31, 2007
Manuscript Accepted: August 1, 2007
Published: September 28, 2007

Virtual Issues
Vol. 2, Iss. 11 Virtual Journal for Biomedical Optics

Citation
M. Holgado, R. Casquel, B. Sánchez, C. Molpeceres, M. Morales, and J. L. Ocaña, "Optical characterization of extremely small volumes of liquid in sub-micro-holes by simultaneous reflectivity, ellipsometry and spectrometry," Opt. Express 15, 13318-13329 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-20-13318


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. D. Van Thourhout, W. Bogaerts, P. Dumon, G. Roelkens, J. Van Campenhout, and R. Baets, "Functional Silicon Wire Waveguides," Proceedings from the conference "Integrated Photonics Research and Application, Nanophotonics, OSA Topical Meetings" (2006).
  2. M. Shinn and W. M. Robertson. "Surface-Plasmon like sensor based on surface electromagnetic waves in a photonic band-gap material," Sens. Actuators B 105, 360-364 (2005). [CrossRef]
  3. W-C. Kuo and C. Chou. "Optical heterodyne surface-plasmon resonance biosensor," Opt. Lett. 28, 1329-1331 (2003). [CrossRef] [PubMed]
  4. J. Homola, S. Yee, and G. Gauglitz "Surface plasmon resonance sensors: review," Sens. Actuators B 54, 3-15 (1999). [CrossRef]
  5. B. J. Luff, J. S. Wilkinson, J. Piehler, U. Hollenbach, J. Ingenhoff, and N. Fabricius. "Integrated optical Mach-Zehnder Biosensor," J. Lightwave Technol. 16, 583 (1998). [CrossRef]
  6. F. Prieto, B. Sepúlveda, A. Calle, A. Llobera, C. Domínguez, A. Abad, A. Montoya, and L. M. Lechuga. "An integrated optical interferometric nanodevice based on silicon technology for biosensor applications," Nanotechnology 14,907-912 (2003). [CrossRef]
  7. D. H. Luo, R. A. Levy, Y. F. Hor, J. F. Federici, and R. M. Pafchek. "An integrated photonic sensor for in situ monitoring of hazardous organics," Sens. actuators B 92, 121-126 (2003). [CrossRef]
  8. B. J. Luff, R. D. Harris, J. S. Wilkinson, R. Wilson, and D. J. Schiffrin. "Integrated-optical directional coupler biosensor," Opt. Lett. 21,618-620 (1996). [CrossRef] [PubMed]
  9. G. H. Cross, A. A. Reeves, S. Brand, J. F. Popplewell, L. L. Peel, M. J. Swann, and N. J. Freeman. "A new quantitative optical biosensor for protein characterization," Biosens. Bioelectron. 19, 383-390 (2003). [CrossRef] [PubMed]
  10. A. Ymeti, J. S. Kanger, J. Greve, P. V. Lambeck, R. Wijn, and R. G. Heideman, "Realization of a multichannel integrated Young interferometer chemical sensor," Appl. Opt. 42,5649-5660 (2003). [CrossRef] [PubMed]
  11. M. Nellen, K. Tiefenthaler, and W. Lukosz. "Integrated optical input grating couplers as biochemical sensors," Sens. Actuators 15, 285-295 (1988). [CrossRef]
  12. S. Campopiano, R. Bernini, L. Zeni, and P. M. Sarro. "Microfluidic sensor based on integrated optical hollow waveguides," Opt. Lett. 29, 1894-1896 (2004). [CrossRef] [PubMed]
  13. N. Skivesen, A. Têtu, M. Kristensen, J. Kjems, L. H. Frandsen, and P. I. Borel. "Photonic crystal waveguide biosensor," Opt. Express 15,3169-3176 (2007). [CrossRef] [PubMed]
  14. E. Chow, A. Grot, L. W. M. Mirkarimi, M. Sigalas, and G. Girolami. "Ultracompact biochemical sensor built with two-dimensional photonic crystal microcavity," Opt. Lett. 29,1093-1095 (2004). [CrossRef] [PubMed]
  15. C. Monat, P. Domachuck, and B. J. Eggleton. "Integrated Optofluidics: A new river of light," Nat. Photonics 1, 106-114 (2007). [CrossRef]
  16. D. Psaltis, S. R. Quake, and C. Yang. "Developing optofluidic technology through the fusion of microfluidics and optics," Nature 442, 381-386 (2006). [CrossRef] [PubMed]
  17. C. Grillet, P. Domachuk, V. Ta’eed, E. Mägi, J. A. Bolger, and B. J. Eggleton. "Compact tunable microfluidic interferometer," Opt. Express 12, 5440-5447 (2004). [CrossRef] [PubMed]
  18. P. Domachuck, H. C. Nguyen, B. J. Eggleton, M. Straub, and M. Gu. "Microfluidic tunable photonic band-gap device," Appl. Phys. Lett. 84, 1838-1840 (2004). [CrossRef]
  19. U. Levy, K. Campbell, A. Groisman, S. Mookherjea, and Y. Fainman. "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88, 111107-111109 (2006). [CrossRef]
  20. K. B. Neeves, C. T. Lo, C. P. Foley, W. M. Saltzman, and W. L. Olbricht. "Fabrication and characterization of microfluidic probes for convection enhanced drug delivery," J. Control. Release 111,252-262 (2006). [CrossRef] [PubMed]
  21. V. S-Y. Lin, K. Motesharei, K-P. S. Dancil, M. J. Sailor, and M. R. Ghadir. "A porous silicon-based optical interferometric biosensor," Science 278, 840 (1997). [CrossRef] [PubMed]
  22. R. M. Ostroff, D. Maul. G. R. Bogart, S. Yang, J. Christian, D. Hopkins, D. Clark, B. Trotter, and G. Moddel. "Fixed polarizer ellipsometry for simple and sensitive detection of thin films generated by specific molecular interactions: applications in immunoassays and DNA sequence detection," Clin. Chem. 44, 2031-2035 (1998). [PubMed]
  23. H. Arwin. "Ellipsometry on thin organic layers of biological interest: characterization and applications," Thin Solid Films 377-378, 48-56 (2000). [CrossRef]
  24. O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, J. S. Harris. "Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing," Proc. SPIE 6447, 2-9 (2007).
  25. A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso and J. T. Fanton. "Beam profile reflectometry: A new technique for dielectric film measurements," Appl. Phys. Lett. 60, 1301-1303 (1992). [CrossRef]
  26. J. T. Fanton, J. Opsal, D. L. Willenborg, S. M. Kelso, and A. Rosencwaig. "Multiparameter measurements of thin films using beam-profile reflectometry," J. Appl. Phys. 73, 7036-7040 (1993). [CrossRef]
  27. J. M. Leng, J. Chen, J. Fanton, M. Senko, K. Ritz, and J. Opsal. "Characterization of titanium nitride TiN films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry," Thin Solid Films 313-314, 308-313 (1998). [CrossRef]
  28. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  29. M. J. Weber. Handbook of optical materials (C.R.C. Press L.L.C., 2003).
  30. O. Gang, K. J. Alvine, M. Fukuto, P. S. Pershan, C. T. Black, and B. M. Ocko. "Liquids on topologically nanopatterned surfaces," Phys. Rev. Lett. 95, 217801-1-4 (2005). [CrossRef] [PubMed]
  31. R. Scarmozzino, A. Gopinath, R. Pregla, and S. Helfert. "Numerical techniques for Modeling Guided-Wave Photonic Devices," J. Sel. Top. Quantum Electron. 6, 150-162 (2000). [CrossRef]
  32. E. Hecht and A. Zajac. Optics, (Addisson-Westley Publishing Company, 1974).
  33. H. G. Tompkins and E. A. Irene. Handbook of Ellipsometry (William Andrew Inc., 2005). [CrossRef]
  34. R. Ince and R. Narayanaswamy, "Analysis of the performance of interferometry, surface plasmon resonance and luminescence as biosensors and chemosensors. Review," Anal. Chim. Acta 569,1-20 (2006). [CrossRef]

Cited By

 Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited