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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 21 — Oct. 17, 2007
  • pp: 13949–13956

Surface profilometry with composite interferometer

Cheng-Chung Lai and I-Jen Hsu  »View Author Affiliations

Optics Express, Vol. 15, Issue 21, pp. 13949-13956 (2007)

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We proposed and demonstrated a low-cost optical system for surface profilometry with nanometer-resolution. The system is based on a composite interferometer consisting of a Michelson interferometer and a Mach-Zehnder interferometer. With the proposed phase compensating mechanism, the phase deviation due to the instability of the optical delay system and environmental perturbation can be compensated simultaneously. The system can perform a wide-field imaging in the millimeter range and a measurement with the axial resolution within ±5 nm without special shielding and protection of the system as well as any special preparation of the sample.

© 2007 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 5, 2007
Revised Manuscript: September 23, 2007
Manuscript Accepted: October 3, 2007
Published: October 9, 2007

Cheng-Chung Lai and I-Jen Hsu, "Surface profilometry with composite interferometer," Opt. Express 15, 13949-13956 (2007)

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