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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 22 — Oct. 29, 2007
  • pp: 14679–14688

Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights  »View Author Affiliations

Optics Express, Vol. 15, Issue 22, pp. 14679-14688 (2007)

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We describe the integration of optically pumped silicon nanocrystals (Si-ncs) embedded in SiO2 with low loss silicon nitride slab waveguides. An emission waveguide containing Si-ncs with a broad band emission centered at 850 nm, together with a low loss transmission silicon nitride waveguide forms a two section device. The waveguides are fabricated via the deposition of SiOx and silicon nitride using ECR-PECVD. Incorporation of hydrogen through annealing, while beneficial to emission from the Si-ncs, is found to increase material absorption in silicon nitride. This is reconciled by annealing at low temperature. This work shows clearly the potential for this material system as a means for the integration of optical emission and waveguiding using a wholly VLSI compatible processing technology. We further suggest that immediate applications exist in particular in the field of evanescent sensing.

© 2007 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials
(130.6010) Integrated optics : Sensors
(200.4650) Optics in computing : Optical interconnects
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

Original Manuscript: September 13, 2007
Revised Manuscript: October 19, 2007
Manuscript Accepted: October 19, 2007
Published: October 24, 2007

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, "Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides," Opt. Express 15, 14679-14688 (2007)

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