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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 25 — Dec. 10, 2007
  • pp: 16712–16718

Compact 90° trench-based splitter for silicon-on-insulator rib waveguides

Yusheng Qian, Jiguo Song, Seunghyun Kim, and Gregory P. Nordin  »View Author Affiliations


Optics Express, Vol. 15, Issue 25, pp. 16712-16718 (2007)
http://dx.doi.org/10.1364/OE.15.016712


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Abstract

Compact silicon-on-insulator (SOI) rib waveguide 90° splitters based on narrow, high-aspect ratio (~10:1) trenches are designed and experimentally demonstrated. The splitter area is only 11 µm×11 µm. Splitter optical performance is investigated as a function of both trench width and refractive index of the trench fill material. We examine three trench fill materials, air (n=1.0), SU8 (n=1.57), and index matching fluid (n=1.733), and find good agreement between experimental measurement and three dimensional (3D) finite difference time domain (FDTD) simulation. A splitting ratio of 49/51 (reflection/transmission) is measured for an index fluid-filled trench 82nm wide.

© 2007 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.1750) Integrated optics : Components
(230.1360) Optical devices : Beam splitters
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Integrated Optics

History
Original Manuscript: November 12, 2007
Revised Manuscript: November 28, 2007
Manuscript Accepted: November 29, 2007
Published: December 3, 2007

Citation
Yusheng Qian, Jiguo Song, Seunghyun Kim, and Gregory P. Nordin, "Compact 90° trench-based splitter for silicon-on-insulator rib waveguides," Opt. Express 15, 16712-16718 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-25-16712


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References

  1. B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, "Advances in Silicon-on-Insulator Optoelectronics," IEEE J. Sel. Top. Quantum Electron. 4, 938-947 (1998). [CrossRef]
  2. Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004). [CrossRef] [PubMed]
  3. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. V. Campenhout, P. Bienstman, and D. V. Thourhout, "Nanophotonic Waveguides in Silicon-on-Insulator Fabricated With CMOS Technology," J. Lightwave Technol.  23, 401- (2005). [CrossRef]
  4. J. Liu, J. Yu, S. Chen, and Z. Li, "Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching," Photon. Technol. Lett. 17, 1187-1189 (2005). [CrossRef]
  5. I. Kiyat, A. Aydinli, N. Dagli, "Low-power thermooptic tuning of SOI resonator switch," Photon. Technol. Lett. 18, 364-366 (2006). [CrossRef]
  6. G. P. Nordin, J. W. Noh, and S. Kim, "In-plane photonic transduction for microcantilever sensor arrays," in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, Alexander N. Cartwright, Dav V. Nicolau, and Paul L. Gourley, Editors, Proceedings of SPIE Vol. 6447, pp. 64470J-1 to -8 (2007).
  7. Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, "Integrated waveguide turning mirror on silicon-on-insulator," Photon. Technol. Lett. 14, 68-70 (2002). [CrossRef]
  8. S. Lardenois, D. Paskcal, L. Vivien, E. Cassan, and S. Laval, "Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors," Opt. Lett. 28, 1150-1152 (2003). [CrossRef] [PubMed]
  9. Y. Qian, S. Kim, J. Song, and G. P. Nordin, "Compact and low loss silicon-on-insulator rib waveguide 90° bend," Opt. Express 14, 6020-6028 (2006) [CrossRef] [PubMed]
  10. C. S. Hsiao and L. Wang, "Design for beam splitting components employing silicon-on-insulator rib waveguide structures," Opt. Lett. 30, 3153-3155 (2005). [CrossRef] [PubMed]
  11. A. Koster, E. Cassan, S. Laval, L. Vivien, and D. Pascal, "Ultracompact splitter for submicrometer silicon-on-insulator rib waveguides," J. Opt. Soc. Am. A 21, 2180-2185 (2004). [CrossRef]
  12. L. Li, G. P. Nordin, J. M. English, and J. Jiang, "Small-area bends and beamsplitters for low-index-contrast waveguides", Opt. Express 11(3), 282-290 (2003). [CrossRef]
  13. D. Goldring, E. Alperovich, U. Levy, and D. Mendlovic, "Analysis of waveguide-splitter-junction in high-index silicon-on-insulator waveguides," Opt. Express 13, 2931-2940 (2005). [CrossRef] [PubMed]
  14. S. Kim, J. Jiang, and G. P. Nordin, "Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures," Opt. Eng. 45, 054602 (2006). [CrossRef]
  15. A. Taflove, Computational Electrodynamics: The Finite-Difference Time-Domain Method, (Artech House, Boston, Mass., 1995).
  16. J. Cai, G. P. Nordin, S. Kim, and J. Jiang, "Three-dimensional analysis of a hybrid photonic crystal-conventional waveguide 90o bend," Appl. Opt. 43, 4244-4249 (2004). [CrossRef] [PubMed]
  17. J. P. Berenger, "A perfectly matched layer for the absorption of electromagnetic waves," J. Comput. Phys. 114, 185-200 (1994). [CrossRef]

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