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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 25 — Dec. 10, 2007
  • pp: 16712–16718

Compact 90° trench-based splitter for silicon-on-insulator rib waveguides

Yusheng Qian, Jiguo Song, Seunghyun Kim, and Gregory P. Nordin  »View Author Affiliations

Optics Express, Vol. 15, Issue 25, pp. 16712-16718 (2007)

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Compact silicon-on-insulator (SOI) rib waveguide 90° splitters based on narrow, high-aspect ratio (~10:1) trenches are designed and experimentally demonstrated. The splitter area is only 11 µm×11 µm. Splitter optical performance is investigated as a function of both trench width and refractive index of the trench fill material. We examine three trench fill materials, air (n=1.0), SU8 (n=1.57), and index matching fluid (n=1.733), and find good agreement between experimental measurement and three dimensional (3D) finite difference time domain (FDTD) simulation. A splitting ratio of 49/51 (reflection/transmission) is measured for an index fluid-filled trench 82nm wide.

© 2007 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.1750) Integrated optics : Components
(230.1360) Optical devices : Beam splitters
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Integrated Optics

Original Manuscript: November 12, 2007
Revised Manuscript: November 28, 2007
Manuscript Accepted: November 29, 2007
Published: December 3, 2007

Yusheng Qian, Jiguo Song, Seunghyun Kim, and Gregory P. Nordin, "Compact 90° trench-based splitter for silicon-on-insulator rib waveguides," Opt. Express 15, 16712-16718 (2007)

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