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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 25 — Dec. 10, 2007
  • pp: 16880–16885

Optical waveguide in stoichiometric lithium niobate formed by 500 keV proton implantation

Lei Wang, Ke-Ming Wang, Feng Chen, Xue-Lin Wang, Liang-Ling Wang, Hong Liu, and Qing-Ming Lu  »View Author Affiliations

Optics Express, Vol. 15, Issue 25, pp. 16880-16885 (2007)

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We report on the fabrication of planar waveguide in stoichiometric lithium niobate by 500 keV proton implantation with a dose of 1×1017 ions/cm2. The formation of ne enhancement planar waveguide in the crystal was disclosed by the dark mode spectra and the subsequent endface coupling measurement. The absorption spectra show that the postannealing treatments above 400°C temperature can remove the color centers induced by implantation efficiently. The propagation loss and near-field profiles of the planar waveguide were obtained with an end-face coupling system.

© 2007 Optical Society of America

OCIS Codes
(130.2790) Integrated optics : Guided waves
(230.7390) Optical devices : Waveguides, planar
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Optical Devices

Original Manuscript: August 30, 2007
Revised Manuscript: October 8, 2007
Manuscript Accepted: November 9, 2007
Published: December 4, 2007

Lei Wang, Ke-Ming Wang, Feng Chen, Xue-Lin Wang, Liang-Ling Wang, Hong Liu, and Qing-Ming Lu, "Optical waveguide in stoichiometric lithium niobate formed by 500 keV proton implantation," Opt. Express 15, 16880-16885 (2007)

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  1. P. D. Townsend, P. J. Chandler, and L. Zhang, Optical Effects of Ion Implantation (Cambridge University Press, Cambridge, 1994). [CrossRef]
  2. A. Guarino, M. Jazbinsek, C. Herzog, R. Degl’Innocenti, G. Poberaj, and P. Günter, "Optical waveguides in Sn2P2S6 by low fluence MeV He+ ion implantation," Opt. Express 14, 2344-2358 (2006). [CrossRef] [PubMed]
  3. G. G. Bentini, M. Bianconi, M. Chiarini, L. Corresra, C. Sada, F. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, "Effect of low dose high energy O3+ implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: Planar optical waveguide formation and characterization," J. Appl. Phys. 92, 6477-6483 (2002). [CrossRef]
  4. H. Hu, F. Lu, F. Chen, F.-X. Wang, J.-H. Zhang, X.-D. Liu, K.-M. Wang, and B.-R. Shi, "Optical waveguide formation by MeV H+ implanted into LiNbO3 crystal," Opt. Commun. 177, 189-193 (2000). [CrossRef]
  5. N. Hamelin, G. Lifante, P. J. Chandler, S. Pityana, and A. J. McCaffery, "Second harmonic generation in ion implanted lithium niobate planar waveguides," J. Mod. Opt. 41, 1339-1348 (1994). [CrossRef]
  6. S.-L. Li, K.-M. Wang, F. Chen, X.-L. Wang, G. Fu, D.-Y. Shen, H.-J. Ma, and R. Nie, "Monomode optical waveguide excited at 1540 nm in LiNbO3 formed by MeV carbon ion implantation at low doses," Opt. Express 12, 747-752 (2004). [CrossRef] [PubMed]
  7. X.-L. Wang, K.-M. Wang, F. Chen, G. Fu, S.-L. Li, H. Liu, L. Gao, D.-Y. Shen, H.-J. Ma, and R. Nie, "Optical properties of stoichiometric LiNbO3 waveguides formed by low-dose oxygen ion implantation," Appl. Phys. Lett. 86, 041103 (2005). [CrossRef]
  8. J. Olivares, G. García, F. Agulló-López, F. Agulló-Rueda, A. Kling, and J. C. Soares, "Generation of amorphous surface layers in LiNbO3 by ion-beam irradiation: thresholding and boundary propagation," Appl. Phys. A 81, 1465-1469 (2005). [CrossRef]
  9. M. Bianconi, N. Argiolas, M. Bazzan, G. G. Bentini, M. Chiarini, A. Cerutti, P. Mazzoldi, G. Pennestrì, and C. Sada, "On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate," Appl. Phys. Lett. 87, 072901 (2005). [CrossRef]
  10. L. Zhang, P. J. Chander, and P. D. Townsend, "Optical analysis of damage profiles in ion implanted LiNbO3," Nucl. Instrum. Meth. B 59/60, 1147-1152 (1991). [CrossRef]
  11. P. J. Chander, L. Zhang, J. M. Cabrera and P. D. Townsend, " ‘Missing’ modes in ion-implanted LiNbO3 waveguides," Appl. Phys. Lett. 54, 1287-1289 (1989). [CrossRef]
  12. S. M. Kostritskii and P. Moretti, "Specific behavior of refractive indices in low-dose He+-implanted LiNbO3 waveguides," J. Appl. Phys. 101, 094109 (2007). [CrossRef]
  13. V. V. Atuchin, "Causes of refractive indices changes in He-implanted LiNbO3 and LiTaO3 waveguides," Nucl. Instrum. Meth. B 168, 498-502 (2000). [CrossRef]
  14. B. M. Park, K. Kitamura, K. Terabe, Y. Furukara, Y. Ji, and E. Suzuki, "Mechanical twinning in stoichiometric lithium niobate single crystal," J. Cryst. Growth 180, 101-104 (1997). [CrossRef]
  15. F. Abdi, M. Aillerie, P. Bourson, M. D. Fontana, and K. Plogar, "Electro-optic properties in pure LiNbO3 crystals from the congruent to the stoichiometric composition," J. Appl. Phys. 84, 2251-2254 (1998). [CrossRef]
  16. P. J. Chandler and F. L. Lama, "A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation," Opt. Acta 33, 127-143 (1986). [CrossRef]
  17. F. Lu, T.-T. Zhang, X.-L. Wang, S.-L. Li, K.-M. Wang, D.-Y. Shen, and H.-J. Ma, "Formation of waveguides by implantation of 3.0 MeV Ni2+," J. Appl. Phys. 96, 3463-3466 (2004). [CrossRef]
  18. H. Hu, F. Lu, F. Chen, B.-R. Shi, K.-M. Wang, and D.-Y. Shen, "Extraordinary refractive-index increase in lithium niobate caused by low-dose ion implantation," Appl. Opt. 40, 3759-3761 (2001). [CrossRef]
  19. J. F. Ziegler, J. P. Biesack, and U. Littmark, Stopping and Ranges of Ions in Matter (Pergamon, New York, 1985).
  20. Y. Jiang, K.-M. Wang, X.-L. Wang, F. Chen, C.-L. Jia, L. Wang, Y. Jiao, and F. Lu, "Model of refractive-index changes in lithium niobate waveguides fabricated by ion implantation," Phys. Rev. B 75, 195101 (2007). [CrossRef]

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