OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 5 — Mar. 5, 2007
  • pp: 2299–2306

A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu  »View Author Affiliations

Optics Express, Vol. 15, Issue 5, pp. 2299-2306 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (2013 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We demonstrate a 50-channel high-resolution arrayed waveguide grating microspectrometer with a 0.2 nm channel spacing on a silicon-on-insulator (SOI) platform. The chip size is 8 mm × 8 mm. High channel density and spectral resolution are achieved using high aspect ratio 0.6 μm × 1.5 μm waveguide apertures to inject the light into the input combiner and to intercept different spectral channels at the output combiner focal region. The measured crosstalk is <-10 dB, the 3 dB channel bandwidth is 0.15 nm, and the insertion loss is -17 dB near the central wavelength of λ = 1.545 μm.

© 2007 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(130.1750) Integrated optics : Components
(130.3120) Integrated optics : Integrated optics devices
(230.7380) Optical devices : Waveguides, channeled
(230.7390) Optical devices : Waveguides, planar
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Integrated Optics

Original Manuscript: December 8, 2006
Revised Manuscript: February 21, 2007
Manuscript Accepted: February 22, 2007
Published: March 5, 2007

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, "A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides," Opt. Express 15, 2299-2306 (2007)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. P. Cheben, "Wavelength dispersive planar waveguide devices: echelle gratings and arrayed waveguide gratings," in Optical Waveguides: from Theory to Applied Technologies, M. L. Calvo and V. Lakshminarayanan, eds. (CRC Press, London, 2007), Chap. 5.
  2. S. H. Kong, J. H. Correira, G, de Graaf, M. Bartek, and R. F. Wolffenbuttel, "Integrated silicon microspectrometer," IEEE Instrumentation & Measurement Magazine 4, 34-38 (2001). [CrossRef]
  3. P. Krippner, J. Mohr, C. Müller, and C. van der Sel, "Microspectrometer for the infrared range," Proc. SPIE 2783, 277-282 (1996). [CrossRef]
  4. J. H. Correia, M. Bartek, and R. F. Wolffenbuttel, "High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum," IEEE Trans. Electron. Devices 47, 553-559 (2000). [CrossRef]
  5. R. V. Kruzelecky and A. K. Ghosh, "High-performance miniature integrated infrared spectrometers for industrial and biochemical sensing," Proc. SPIE 4205, 25- 34 (2001). [CrossRef]
  6. S. H. Kong, D. D. L. Wijngaards, and R. F. Wolffenbuttel, "Infrared micro-spectrometer based on diffraction grating," Sens. Actuators A 92, 88-95 (2001). [CrossRef]
  7. Z. M. Qi, N. Matsuda, T. Yoshida, H. Asano, A. Takatsu, and K. Kato, "Optical waveguide spectrometer based on thin-film glass plates," Opt. Lett. 27, 2001-2003 (2002). [CrossRef]
  8. D. Sander and J. Müller, "Self-focusing phase transmission grating for an integrated optical microspectrometer," Sens. Actuators A 88, 1-9 (2001). [CrossRef]
  9. J. T. Bradshaw, S. B. Mendes, and S. S. Saavedra, "Planar integrated optical waveguide spectroscopy," Anal. Chem. 77, 29-36 (2005). [CrossRef]
  10. K. K. Choi, G. Dang, J. W. Little, K. M. Leung, and T. Tamir, "Quantum grid infrared spectrometer," Appl. Phys. Lett. 84, 4439-4441 (2004). [CrossRef]
  11. H. Stiebig, D. Knipp, and E. Bunte, "Standing-wave spectrometer," Appl. Phys. Lett. 88, 083509 (2006). [CrossRef]
  12. O. Manzardo, R. Michaely, F. Schadelin, W. Noell, T. Overstolz, N. D. Rooij, and H. P. Herzig, "Miniature lamellar grating interferometer based on silicon technology," Opt. Lett. 29,1437-1439 (2004). [CrossRef] [PubMed]
  13. O. Martínez, M. L. Calvo, P. Cheben, S. Janz, J. A. Rodrigo, D.-X. Xu, and A. Delâge, "Arrayed waveguide grating based on group index modification," J. Lightwave Technol. 24,1551-1557 (2006). [CrossRef]
  14. R. A. Soref, "Silicon-based optoelectronics," Proceedings of the IEEE Vol. 81,1687-1706 (1993). [CrossRef]
  15. G. Reed and A. P. Knights, Silicon Photonics - an Introduction (Wiley, Chichester, 2004). [CrossRef]
  16. L. Pavesi and D. J. Lockwood, eds., Silicon Photonics (Springer, Berlin, 2004).
  17. A. P. Knights and P. E. Jessop, "Silicon waveguides for integrated optics," in Optical Waveguides: from Theory to Applied Technologies, M. L. Calvo and V. Lakshminarayanan, eds. (CRC Press, London, 2007), Chap. 6.
  18. P.D. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, "Silicon-on-insulator (SOI) phased-array wavelength multi-demultiplexer with extremely low polarization sensitivity," IEEE Photon. Technol. Lett. 9, 812-815 (1997). [CrossRef]
  19. M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, "Arrayed waveguide grating demultiplexers in silicon-on-insulator," SPIE Proc. 3953,11-18 (2000). [CrossRef]
  20. D.-X. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M.-J. Picard, and W. N. Ye, "Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress," Opt. Lett. 29, 2384-2386 (2004). [CrossRef] [PubMed]
  21. W. N. Ye, D.-X. Xu, S. Janz, P. Cheben, M. J. Picard, B. Lamontagne, and N. G. T. Tarr, "Birefringence control using stress enginering in silicon-on-insulator (SOI) waveguides," J. Lightwave Technol. 23, 1308-1318 (2005). [CrossRef]
  22. P. Cheben, D.-X. Xu, S. Janz, and A. Delâge, "Scaling down photonic waveguide devices on the SOI platform," SPIE Proc. 5117, 147-156 (2003). [CrossRef]
  23. P. Cheben, A. Delâge, L. Erickson, S. Janz, and D.-X. Xu, "Polarization compensation in silicon-on-insulator arrayed waveguide grating devices," SPIE Proc. 4293, 15-22 (2001). [CrossRef]
  24. P. Cheben, D.-X. Xu, S. Janz, A. Delâge, and D. Dalacu, "Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,". SPIE Proc. 4997, 181-189 (2003). [CrossRef]
  25. P. Cheben, A. Bogdanov, A. Delâge, S. Janz, B. Lamontagne, M. J. Picard, E. Post, and D.-X. Xu, "A 100-channel near-infrared SOI waveguide microspectromer: Design and fabrication challenges," SPIE Proc. 5644, 103-110 (2005). [CrossRef]
  26. D.-X. Xu, W.N. Ye, A. Bogdanov, D. Dalacu, A. Delage, P. Cheben, S. Janz, B. Lamontagne, and M.-J. Picard, "Design or polarization insensitive components using geometrical and stress induced birefringence in SOI waveguides," SPIE Proc. 5730, 158-172 (2005). [CrossRef]
  27. T. Fukazawa, F. Ohno and T. Baba, "Very compact arrayed-waveguide-grating demultiplexer using Si photonic wire waveguides," Jpn. J. Appl. Phys. 43, L673 - L675 (2004). [CrossRef]
  28. K. Sasaki, F. Ohno, A. Motegi, "Arrayed waveguide grating of 70×60 µm2 size based on Si photonic wire waveguides," Electron. Lett. 41, 801-802 (2005). [CrossRef]
  29. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, and P. Jaenen, "Compact wavelength router based on a Silicon-on-insutaor arrayed waveguide grating pigtailed to a fiebr array," Opt. Express 14, 664-669 (2006). [CrossRef] [PubMed]
  30. M. K. Smit and C. Van Dam, "PHASAR-based WDM devices: principles, design, and application," IEEE J. Sel. Top. Quantum Elect. 2,236-250 (1996). [CrossRef]
  31. J. H Schmid, B. Lamontagne, P. Cheben, A. Delage, A. Densmore, S. Janz, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, "Mode converters for coupling to high aspect ratio silicon-on-insulator channel waveguides," to be published in IEEE Photon. Technol. Lett. (2007).
  32. K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890 (2001). [CrossRef]
  33. A. Delâge, S. Bidnyk, P. Cheben, K. Dossou, S. Janz, M. Packirisamy, and D.-X. Xu, "Recent developments in integrated spectrometers," in Proceedings of IEEE ICTON’04 Conference, 78-83 (2004).
  34. K. Takada, M. Abe, T. Shibata, and K. Okamoto, "Tandem multi/demultiplexer covering the S-, C-, and L-bands using arrayed waveguide grating with Gaussian passband as primary filter," IEEE Photon. Technol. Lett. 14, 648-650 (2002). [CrossRef]
  35. M. Popović, K. Wada, S. Akiyama, H.A. Haus, J. Michel, "Air trenches for sharp silica waveguide bends," J. Lightwave Technol. 20, 1762-1772 (2002). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited