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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 15, Iss. 8 — Apr. 16, 2007
  • pp: 4435–4444

Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry

Hyug-Gyo Rhee, Jiyoung Chu, and Yun-Woo Lee  »View Author Affiliations


Optics Express, Vol. 15, Issue 8, pp. 4435-4444 (2007)
http://dx.doi.org/10.1364/OE.15.004435


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Abstract

We describe a method of absolute xyz-coordinates measurement based on the two-point diffraction interferometer. In this paper we use a new optimization algorithm to the interferometer. Experimental results show that the systematic error of the interferometer is less than 1 μm (peak-to-valley value) within a 60 mm by 60 mm by 20 mm working volume. To extract the systematic error and verify the absolute performance of the interferometer we applied the Fourier self-calibration concept.

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: January 23, 2007
Revised Manuscript: March 28, 2007
Manuscript Accepted: March 28, 2007
Published: April 3, 2007

Citation
Hyug-Gyo Rhee, Jiyoung Chu, and Yun-Woo Lee, "Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry," Opt. Express 15, 4435-4444 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-8-4435


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References

  1. P. de Groot, "Grating interferometer for flatness testing," Opt. Lett. 21, 228-230 (1996). [CrossRef] [PubMed]
  2. R. Dändliker, R. Thalmann, and D. Prongué, "Two-wavelength laser interferometry using superheterodyne detection," Opt. Lett. 13, 339-341 (1988). [CrossRef] [PubMed]
  3. Z. Sodnik, E. Fischer, T. Ittner, and H. J. Tiziani, "Two-wavelength double heterodyne interferometry using a matched grating technique," Appl. Opt. 30, 3139-3144(1991). [CrossRef] [PubMed]
  4. H. Kikuta, K. Iwata, and R. Nagata, "Distance measurement by the wavelength shift of laser diode light," Appl. Opt. 25, 2976-2980 (1986). [CrossRef] [PubMed]
  5. H. Kikuta, K. Iwata, and R. Nagata, "Absolute distance measurement by wavelength shift interferometry with a laser diode light: some systematic error sources," Appl. Opt. 26, 1654-1660 (1987). [CrossRef] [PubMed]
  6. T. Li, A. Wang, K. Merphy, and R. Claus, "White-light scanning fiber Michelson interferometer for absolute position-distance measurement," Opt. Lett. 20, 785-787 (1995). [CrossRef] [PubMed]
  7. U. Schnell and R. Dändliker, "Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target," Opt. Lett. 21, 528-530 (1996). [CrossRef] [PubMed]
  8. M. R. Hee, J. A. Izatt, J. M. Jacobson, J. G. Fujimoto, and E. A. Swanson, "Femtosecond transillumination optical coherence tomography," Opt. Lett. 18, 950-951 (1993). [CrossRef] [PubMed]
  9. J. Ye, "Absolute measurement of long, arbitrary distance to less than an optical fringe," Opt. Lett. 29, 1153-1155 (2004). [CrossRef] [PubMed]
  10. K. Minoshima, and H. Matsumoto, "High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser," Appl. Opt. 39, 5512-5517 (2000). [CrossRef]
  11. K. Lau, R. J. Hocken, and W. C. Haight, "Automatic laser tracking interferometer system for robot metrology," Prec. Eng. 8, 3-8 (1986). [CrossRef]
  12. O. Nakamura, M. Goto, K. Toyoda, Y. Tanimura, and T. Kurosawa, "Development of a coordinate measuring system with tracking laser interferometer," Annals of CIRP 40, 523-526 (1991). [CrossRef]
  13. E. B. Hughes, A Wilson, and G. N. Peggs, "Design of a high-accuracy CMM based on multi-lateration techniques," Annals of CIRP 49, 391-394 (2000). [CrossRef]
  14. H. Jiang, S. Osawa, T. Takatsuji, H. Noguchi, and T. Kurosawa, "High-performance laser tracker using an articulation mirror for the calibration of coordinate measuring machine," Opt. Eng. 41, 632-637 (2002). [CrossRef]
  15. H.G. Rhee, and S.W. Kim, "Absolute distance measurement by two-point diffraction interferometry," Appl. Opt. 41, 5921-5928 (2002). [CrossRef] [PubMed]
  16. J. Chu, and S. W. Kim, "Absolute distance measurement by lateral shearing interferometry of point-diffracted spherical waves," Opt. Express 14, 5961-5967 (2006). [CrossRef] [PubMed]
  17. J. Ye, M. Takac, C. N. Berglund, G. Owen, and R. F. Pease, "An exact algorithm for self-calibration of two-dimensional precision metrology stages," Prec. Eng. 20, 16-32 (1997). [CrossRef]
  18. A. D. Belegundu, and T.R. Chandrupatla, "Simulated annealing (SA)," in Optimization concepts and applications in engineering, M. Horton, ed. (Prentice-Hall, Inc., New Jersey, 1999).
  19. H. Kihm, and S. W. Kim, "Nonparaxial free-space diffraction from oblique end faces of single-mode optical fibers," Opt. Lett. 29, 2366-2368 (2004). [CrossRef] [PubMed]
  20. ISO, "Guide to the expression of uncertainty in measurement," in International vocabulary of basic and general terms in metrology, International Organization for Standardization ed. (International Organization for Standardization, Switzerland, 1993).
  21. D. G. Cameron, J. K. Kauppinen, D. J. Moffatt, and H. H. Mantsch, "Precision in condensed phase vibrational spectroscopy," Appl. Spectrosc. 36, 245-250 (1982). [CrossRef]

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