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Optics Express

Optics Express

  • Editor: C. Martijin de Sterke
  • Vol. 15, Iss. 9 — Apr. 30, 2007
  • pp: 5277–5287

Three Gaussian beam interferometric profilometer applied to the characterization of an optical flat

Lorenzo Juárez P., Moisés Cywiak, Manuel ServÍn, and J. Mauricio Flores  »View Author Affiliations

Optics Express, Vol. 15, Issue 9, pp. 5277-5287 (2007)

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A three-beam scanning optical interferometric microscopic technique applied to roughness characterization of optical flats is described. The technique is based on the heterodinization of three coherent optical beams. One of the beams, the probe beam, is focused on the surface under test. A second beam is obtained after being reflected by a reference surface. Finally, the last beam consists of one of the first orders of diffraction that emerges of a Bragg-cell. The three beams are coherently added at the sensitive surface of a photodetector that integrates the overall intensity of the beams. We show analytically that, the electrical signal at the output of the photodetector, is a time-varying signal whose amplitude is proportional to the surface local vertical height. We characterize experimentally the frequency response of the system by measuring the profile of three different gratings. We show measurements of the roughness of an optical flat processed by means of the frequency response of the system.

© 2007 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(240.6700) Optics at surfaces : Surfaces

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 1, 2007
Revised Manuscript: March 27, 2007
Manuscript Accepted: April 9, 2007
Published: April 16, 2007

Lorenzo Juárez P., Moisés Cywiak, Manuel Servín, and J. M. Flores, "Three Gaussian beam interferometric profilometer applied to the characterization of an optical flat," Opt. Express 15, 5277-5287 (2007)

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