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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 1 — Jan. 7, 2008
  • pp: 340–354

Absolute planarity with three-flat test: an iterative approach with Zernike polynomials

Maurizio Vannoni and Giuseppe Molesini  »View Author Affiliations


Optics Express, Vol. 16, Issue 1, pp. 340-354 (2008)
http://dx.doi.org/10.1364/OE.16.000340


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Abstract

An iterative algorithm to analyze three-flat test data for absolute planarity measurements is presented. Using the properties of Zernike polynomial representations, results are achieved in a fast and effective manner. Details and demonstrative examples are provided.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 5, 2007
Revised Manuscript: October 1, 2007
Manuscript Accepted: November 8, 2007
Published: January 4, 2008

Citation
Maurizio Vannoni and Giuseppe Molesini, "Absolute planarity with three-flat test: an iterative approach with Zernike polynomials," Opt. Express 16, 340-354 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-1-340


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References

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