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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 11 — May. 26, 2008
  • pp: 7789–7803

Influence of cross-correlation effects on the optical quantities of rough films

Daniel Franta, Ivan Ohlídal, and David Nečas  »View Author Affiliations

Optics Express, Vol. 16, Issue 11, pp. 7789-7803 (2008)

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Within the Rayleigh–Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.

© 2008 Optical Society of America

OCIS Codes
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(240.2130) Optics at surfaces : Ellipsometry and polarimetry

ToC Category:
Optics at Surfaces

Original Manuscript: May 5, 2008
Revised Manuscript: May 12, 2008
Manuscript Accepted: May 13, 2008
Published: May 14, 2008

Daniel Franta, Ivan Ohlídal, and David Necas, "Influence of cross-correlation effects on the optical quantities of rough films," Opt. Express 16, 7789-7803 (2008)

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