Individually-addressable flip-chip AlInGaN micropixelated light emitting diode arrays with high continuous and nanosecond output power

doi:10.1364/OE.16.009918

Individually-addressable flip-chip AlInGaN micropixelated light emitting diode arrays with high continuous and nanosecond output power

H. X. Zhang, D. Massoubre, J. McKendry, Z. Gong, B. Guilhabert, C. Griffin, E. Gu, P. E. Jessop, J. M. Girkin, and M. D. Dawson »View Author Affiliations

Optics Express, Vol. 16, Issue 13, pp. 9918-9926 (2008)
http://dx.doi.org/10.1364/OE.16.009918

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Abstract

Micropixelated blue (470nm) and ultraviolet (370nm) AlInGaN light emitting diode (‘micro-LED’) arrays have been fabricated in flip-chip format with different pixel diameters (72µm and 30µm at, respectively, 100 and 278 pixels/mm²). Each micro-LED pixel can be individually-addressed and the devices possess a specially designed n-common contact incorporated to ensure uniform current injection and consequently uniform light emission across the array. The flip-chip micro-LEDs show, per pixel, high continuous output intensity of up to 0.55µW/µm² (55W/cm²) at an injection current density of 10kA/cm² and can sustain continuous injection current densities of up to 12kA/cm² before breakdown. We also demonstrate that nanosecond pulsed output operation of these devices with per pixel on-axis average peak intensity up to 2.9µW/µm² (corresponding to energy of 45pJ per 22ns optical pulse) can be achieved. We investigate the pertinent performance characteristics of these arrays for micro-projection applications, including the prospect of integrated optical pumping of organic semiconductor lasers.

OCIS Codes
(180.1790) Microscopy : Confocal microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3670) Optical devices : Light-emitting diodes
(230.3990) Optical devices : Micro-optical devices
(230.6080) Optical devices : Sources

ToC Category:
Microscopy

History
Original Manuscript: March 19, 2008
Revised Manuscript: May 9, 2008
Manuscript Accepted: May 15, 2008
Published: June 20, 2008

Virtual Issues
Vol. 3, Iss. 7 Virtual Journal for Biomedical Optics

Citation
H. X. Zhang, D. Massoubre, J. McKendry, Z. Gong, B. Guilhabert, C. Griffin, E. Gu, P. E. Jessop, J. M. Girkin, and M. D. Dawson, "Individually-addressable flip-chip AlInGaN micropixelated light emitting diode arrays with high continuous and nanosecond output power," Opt. Express 16, 9918-9926 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-13-9918

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References

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V. Adivarahan, S. Wu, W. H. Sun, V. Mandavilli, M. S. Shatalov, G. Simin, J. W. Yang, H. P. Maruska, and M. A. Khan, "High-power deep ultraviolet light-emitting diodes based on a micro-pixel design," Appl. Phys. Lett. 85, 1838-1840 (2004). [CrossRef]
C. W. Jeon, H. W. Choi, E. Gu, and M. D. Dawson, "High-density matrix-addressable AlInGaN-based 368nm microarray light-emitting diodes," IEEE Photon. Technol. Lett. 16, 2421-2423 (2004). [CrossRef]
H. W. Choi, C. W. Jeon, and M. D. Dawson, "High-resolution 128x96 nitride microdisplay," IEEE Electron Dev. Lett. 25, 277-279 (2004). [CrossRef]
H. X. Zhang, E. Gu, C. W. Jeon, Z. Gong, M. D. Dawson, M. A. A. Neil, and P. M. W. French, "Microstripe-array InGaN light-emitting diodes with individually addressable elements,"IEEE Photon. Technol. Lett. 18, 1681-1683 (2006). [CrossRef]
C. W. Jeon, E. Gu, and M. D. Dawson, "Mask-free photolithographic exposure using a matrix-addressable micropixellated AlInGaN ultraviolet light-emitting diode," Appl. Phys. Lett. 86, 221105 (2005). [CrossRef]
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V. Poher, H. X. Zhang, G. T. Kennedy, C. Griffin, S. Oddos, E. Gu, D. S. Elson, J. M. Girkin, P. M. W. French, M. D. Dawson and M. A. A. Neil, "Optical sectioning microscopes with no moving parts using a micro-stripe array light emitting diode," Opt. Express 15, 11196-11206 (2007). [CrossRef] [PubMed]
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B. R. Rae, C. Griffin, J. McKendry, J. M. Girkin, H. X. Zhang, E. Gu, D. Renshaw, E. Charbon, M. D. Dawson, and R. K. Henderson, "CMOS driven micro-pixel LEDs integrated with single photon avalanche diodes for time resolved fluorescence measurements," J. Phys. D: Applied Physics 41, 094011 (2008). [CrossRef]
J. A. Chediak, Z. Luo, J. Seo, N. Cheung, L. P. Lee, and T. D. Sands, "Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems," Sens. Actuators A. 111, 1-7 (2004). [CrossRef]
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E. Gu, H. W. Choi, G. McConnell, A. M. Gurney, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, "Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays," Appl. Phys. Lett. 84, 2754-2756 (2004). [CrossRef]
C. Griffin, E. Gu, H. W. Choi, C. W. Jeon, J. M. Girkin, and M. D. Dawson, "Beam divergence measurements of InGaN/GaN micro-array light emitting diodes using confocal microscopy," Appl Phys. Lett. 86, 041111 (2005). [CrossRef]
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K. Kawasaki, C. Koike, Y. Aoyagi, and M. Takeuchi, "Vertical AlGaN deep ultraviolet light emitting diode emitting at 322nm fabricated by the laser lift-off technique," Appl Phys. Lett. 89, 261114 (2006). [CrossRef]

Adivarahan, V.
Aoyagi, Y.
Belton, C.
Bradley, D. D. C.
Burns, D.
Charbon, E.
Chediak, J. A.
Cheung, N.
Chiou, P. Y.
Choi, H. W.
Cui, G.
Dawson, M. D.
deMello, J. C.
Diagne, M.
Elson, D. S.
Fareed, Q.
Ferguson, A. I.
French, P. M. W.
Gaevski, M.
Gärtner, C.
Gherasimova, M.
Girkin, J. M.
Gong, Z.
Griffin, C.
Gu, E.
Guo, X.
Gurney, A. M.
Han, J.
Haug, V.
He, Y.
Heliotis, G.
Hempler, N.
Henderson, R. K.
Hopkins, J.-M.
Jeon, C. W.
Jeon, S.-R.
Jiang, H. X.
Jin, S. X.
Karnutsch, C.
Katona, T.
Kawasaki, K.
Kemp, A. J.
Kennedy, G.
Kennedy, G. T.
Khan, A.
Khan, M. A.
Koike, C.
Kuehne, A. J. C.
Lee, L. P.
Lemmer, U.
Li, J.
Lin, J. Y.
Liu, C.
Luo, Z.
Mackintosh, A. R.
Makarona, E.
Mandavilli, V.
Maruska, H. P.
McConnell, G.
McKendry, J.
Moreno, I.
Neil, M. A. A.
Nurmikko, A. V.
Oddos, S.
Ohta, A. T.
Ozden, I.
Peng, H.
Pethrick, R. A.
Pflumm, C.
Poher, V.
Rae, B. R.
Rattunde, M.
Ren, Z.
Renshaw, D.
Sands, T. D.
Schubert, E. F.
Schulz, N.
Seo, J.
Shakya, J.
Shatalov, M. S.
Simin, G.
Song, Y. K.
Srivastaka, S.
Su, J.
Sun, C.-C.
Sun, H. D.
Sun, W. H.
Takeuchi, M.
Takeuchi, T.
Wagner, J.
Wang, J.
Watson, I. M.
Weimann, T.
Wokosin, D. L.
Wu, M. C.
Wu, S.
Yang, J. W.
Zhang, H. X.

Appl Phys. Lett.

C. Griffin, E. Gu, H. W. Choi, C. W. Jeon, J. M. Girkin, and M. D. Dawson, "Beam divergence measurements of InGaN/GaN micro-array light emitting diodes using confocal microscopy," Appl Phys. Lett. 86, 041111 (2005). [CrossRef]
K. Kawasaki, C. Koike, Y. Aoyagi, and M. Takeuchi, "Vertical AlGaN deep ultraviolet light emitting diode emitting at 322nm fabricated by the laser lift-off technique," Appl Phys. Lett. 89, 261114 (2006). [CrossRef]

Appl. Phys. Lett.

H. X. Jiang, S. X. Jin, J. Li, J. Shakya, and J. Y. Lin, "III-nitride blue microdisplay," Appl. Phys. Lett. 78, 1303-1305 (2001). [CrossRef]
V. Adivarahan, S. Wu, W. H. Sun, V. Mandavilli, M. S. Shatalov, G. Simin, J. W. Yang, H. P. Maruska, and M. A. Khan, "High-power deep ultraviolet light-emitting diodes based on a micro-pixel design," Appl. Phys. Lett. 85, 1838-1840 (2004). [CrossRef]
C. W. Jeon, E. Gu, and M. D. Dawson, "Mask-free photolithographic exposure using a matrix-addressable micropixellated AlInGaN ultraviolet light-emitting diode," Appl. Phys. Lett. 86, 221105 (2005). [CrossRef]
H. Peng, E. Makarona, Y. He, Y. K. Song, A. V. Nurmikko, J. Su, Z. Ren, M. Gherasimova, S.-R. Jeon, G. Cui, J. Han, "Ultraviolet light-emitting diodes operating in the 340nm wavelength range and application to time-resolved fluorescence spectroscopy," Appl. Phys. Lett. 85, 1436 (2004). [CrossRef]
E. Gu, H. X. Zhang, H. D. Sun, M. D. Dawson, A. R. Mackintosh, A. J. C. Kuehne, R. A. Pethrick, C. Belton and D. D. C. Bradley, "Hybrid inorganic/organic microstructured light-emitting diodes produced using photocurable polymer blends," Appl. Phys. Lett. 90, 031116 (2007). [CrossRef]
C. Karnutsch, C. Pflumm, G. Heliotis, J. C. deMello, D. D. C. Bradley, J. Wang, T. Weimann, V. Haug, C. Gärtner, and U. Lemmer, "Improved organic semiconductor lasers based on a mixed-order distributed feedback resonator design," Appl. Phys. Lett. 90, 131104 (2007). [CrossRef]
X. Guo and E. F. Schubert, "Current crowding and optical saturation effects in GaInN/GaN light emitting diodes grown on insulating substrates," Appl. Phys. Lett. 78, 3337-3339 (2001). [CrossRef]
E. Gu, H. W. Choi, G. McConnell, A. M. Gurney, C. Liu, C. Griffin, J. M. Girkin, I. M. Watson, and M. D. Dawson, "Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays," Appl. Phys. Lett. 84, 2754-2756 (2004). [CrossRef]

IEEE Electron Dev. Lett.

H. W. Choi, C. W. Jeon, and M. D. Dawson, "High-resolution 128x96 nitride microdisplay," IEEE Electron Dev. Lett. 25, 277-279 (2004). [CrossRef]

IEEE Photon. Technol. Lett.

H. X. Zhang, E. Gu, C. W. Jeon, Z. Gong, M. D. Dawson, M. A. A. Neil, and P. M. W. French, "Microstripe-array InGaN light-emitting diodes with individually addressable elements,"IEEE Photon. Technol. Lett. 18, 1681-1683 (2006). [CrossRef]
C. W. Jeon, H. W. Choi, E. Gu, and M. D. Dawson, "High-density matrix-addressable AlInGaN-based 368nm microarray light-emitting diodes," IEEE Photon. Technol. Lett. 16, 2421-2423 (2004). [CrossRef]

IEEE Trans. Electron. Dev.

Z. Gong, H. X. Zhang, E. Gu, C. Griffin, M. D. Dawson, V. Poher, G. Kennedy, P. M. W. French, and M. A. A. Neil, "Matrix-addressable micropixellated InGaN light-emitting diodes with uniform emission and increased light output," IEEE Trans. Electron. Dev. 54, 2650 (2007). [CrossRef]

J. Phys. D: Applied Physics

B. R. Rae, C. Griffin, J. McKendry, J. M. Girkin, H. X. Zhang, E. Gu, D. Renshaw, E. Charbon, M. D. Dawson, and R. K. Henderson, "CMOS driven micro-pixel LEDs integrated with single photon avalanche diodes for time resolved fluorescence measurements," J. Phys. D: Applied Physics 41, 094011 (2008). [CrossRef]

Jpn J. Appl. Phys.

V. Adivarahan, Q. Fareed, S. Srivastaka, T. Katona, M. Gaevski, and A. Khan, "Robust 285nm deep UV light emitting diodes over metal organic hybride vapor phase eptaxially grown AlN/Sapphire templates," Jpn J. Appl. Phys. 46, L537-L539 (2007). [CrossRef]

Nature

P. Y. Chiou, A. T. Ohta and M. C. Wu, Nature, "Massively parallel manipulation of single cells and microparticles using optical images," Nature 436, 370-372, (2005). [CrossRef] [PubMed]

Opt. Express

Phys. Stat. Solidi

I. Ozden, M. Diagne, A. V. Nurmikko, J. Han, and T. Takeuchi, "Matrix-addressable 1024 element blue light emitting InGaN QW diode array," Phys. Stat. Solidi(a) 188, 139 (2001). [CrossRef]

Sens. Actuators A.

J. A. Chediak, Z. Luo, J. Seo, N. Cheung, L. P. Lee, and T. D. Sands, "Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems," Sens. Actuators A. 111, 1-7 (2004). [CrossRef]

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