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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 15 — Jul. 21, 2008
  • pp: 11513–11518

High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding

Long Chen, Po Dong, and Michal Lipson  »View Author Affiliations


Optics Express, Vol. 16, Issue 15, pp. 11513-11518 (2008)
http://dx.doi.org/10.1364/OE.16.011513


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Abstract

We demonstrate germanium photodetectors integrated on submicron silicon waveguides fabricated with a low temperature (≤ 400°C) wafer bonding and ion-cut process. The devices shows a low dark current of ∼100 nA, a fiber accessed responsivity of > 0.4 A/W and an estimated quantum efficiency of above 90%.

© 2008 Optical Society of America

OCIS Codes
(040.5160) Detectors : Photodetectors
(200.4650) Optics in computing : Optical interconnects
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Detectors

History
Original Manuscript: May 5, 2008
Revised Manuscript: June 25, 2008
Manuscript Accepted: July 11, 2008
Published: July 17, 2008

Citation
Long Chen, Po Dong, and Michal Lipson, "High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding," Opt. Express 16, 11513-11518 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-15-11513


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References

  1. D. A. B. Miller, "Optical interconnects to silicon," IEEE J. Sel. Top. Quantum Electron. 6, 1312-1317 (2000). [CrossRef]
  2. K. K. Lee, D. R. Lim, and L. C. Kimerling, "Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction," Opt. Lett. 26, 1888-1890 (2001). [CrossRef]
  3. F. Xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nat. Photonics 1, 65-71 (2007). [CrossRef]
  4. H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
  5. A. Fang, H.  Park, O.  Cohen, R.  Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express  14, 9203-9210 (2006). [CrossRef] [PubMed]
  6. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
  7. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
  8. H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. Sysak, M. Paniccia, and J. Bowers, "A hybrid AlGaInAs-silicon evanescent waveguide photodetector," Opt. Express 15, 6044-6052 (2007). [CrossRef] [PubMed]
  9. G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
  10. M. Jutzi, M. Berroth, G. Wöhl, M. Oehme, and E. Kasper, "Ge-on-Si vertical incidence photodiodes with 39-GHz bandwidth," IEEE Photon. Technol. Lett. 17, 1510-1512 (2005). [CrossRef]
  11. J. Liu, D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications," Appl. Phys. Lett.  87, 011110-1-3 (2005).
  12. M.  Rouvière, M.  Halbwax, J-L.  Cercus, E.  Cassan, L.  Vivien, D.  Pascal, M.  Heitzmann, J-M.  Hartmann, and S.  Laval, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng.  44, 75402-75406 (2005). [CrossRef]
  13. D. Ahn, C. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, "High performance, waveguide integrated Ge photodetectors," Opt. Express 15, 3916-3921 (2007). [CrossRef] [PubMed]
  14. L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
  15. T. Yin, R. Cohen, M. Morse1, G. Sarid, Y. Chetrit, D. Rubin, and Mario J. Paniccia, "31GHz Ge n-i-p waveguide photodetectors on Silicon-on-Insulator substrate," Opt. Express 15, 13965-13971 (2007). [CrossRef] [PubMed]
  16. L. Colace, G. Masini A. Altieri, and G. Assanto, "Waveguide photodetectors for the near-infrared in polycrystalline germanium on silicon," IEEE Photon. Technol. Lett. 18, 1094-1096 (2006). [CrossRef]
  17. A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005). [CrossRef]
  18. K. Preston, B. Schmidt, and M. Lipson, "Polysilicon photonic resonators for large-scale 3D integration of optical networks," Opt. Express 15, 17283-17290 (2007). [CrossRef] [PubMed]
  19. J. M. Fedeli, M. Migette, L. Di Cioccio, L. El Melhaoui, R. Orobtchouk, C. Seassal, P. RojoRomeo, F. Mandorlo, D. Marris-Morini, and L. Vivien, "Incorporation of a photonic layer at the metallization levels of a CMOS circuit," in Proceedings of IEEE International Conference on Group IV Photonics (IEEE, 2006), pp. 200-202.
  20. Q. Tong, L. Huang, and U. Gosele, "Transfer of semiconductor and oxide films by wafer bonding and layer cutting," J. Electron. Mater. 29, 928-932 (2000). [CrossRef]
  21. V. R. Almeida, R. R. Panepucci, and M. Lipson, "Nanotaper for compact mode conversion," Opt. Lett. 28, 1302-1304 (2003). [CrossRef] [PubMed]
  22. C. O. Chui, A. K. Okyay, and K. C. Saraswat, "Effective dark current suppression with asymmetric MSM photodetectors in group IV semiconductors," IEEE Photon. Technol. Lett. 15, 1585-1587 (2006). [CrossRef]
  23. M. Levinshtein and G. S. Simin, Getting to Know Semiconductors (World Scientific, 1992).

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